Analysis of wafer sojourn time in dual-arm cluster tools with residency time constraint and activity time variation

IEEE Transactions on Semiconductor Manufacturing

Volumn 23, Issue 1, 2010, Pages 53-64

  Wu, Naiqi ^a   Zhou, Mengchu ^b,c  

^a GUANGDONG UNIVERSITY OF TECHNOLOGY   (China)

^b NEW JERSEY INSTITUTE OF TECHNOLOGY   (United States)

^c XIDIAN UNIVERSITY   (China)

Author keywords

Automated manufacturing systems; Cluster tool; Discrete event systems; Modeling and analysis; Petri net; Schedulability analysis; Scheduling

Indexed keywords

ACTIVITY TIME; AUTOMATED MANUFACTURING SYSTEMS; CLUSTER TOOL; DISCRETE EVENT SYSTEMS; FEASIBLE SCHEDULE; KNOW-HOW; ON-WAFER; OPERATIONAL ARCHITECTURE; PETRI NET MODELS; PN MODELS; PROCESSING MODULES; SCHEDULABILITY ANALYSIS; SOJOURN TIME; STEADY-STATE SCHEDULING; TIME CONSTRAINTS; UPPER BOUND;

DELAY CONTROL SYSTEMS; DENSE WAVELENGTH DIVISION MULTIPLEXING; GRAPH THEORY; PETRI NETS; PRODUCTION ENGINEERING; REAL TIME CONTROL; SCHEDULING;

TOOLS;

EID: 76849088211     PISSN: 08946507     EISSN: None     Source Type: Journal    
DOI: 10.1109/TSM.2009.2039243     Document Type: Article

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