An efficient mixed integer programming model based on timed petri nets for diverse complex cluster tool scheduling problems

IEEE Transactions on Semiconductor Manufacturing

Volumn 25, Issue 2, 2012, Pages 186-199

  Jung, Chihyun ^a   Lee, Tae Eog ^b  

^a IBM MICROELECTRONICS   (United States)

^b Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

Author keywords

Cluster tool; cyclic scheduling; mixed integer programming (MIP); Petri net

Indexed keywords

AUTOMATED PRODUCTION CELLS; CLUSTER TOOL; COMPLEX CLUSTERS; CYCLIC SCHEDULES; CYCLIC SCHEDULING; DUAL-ARM ROBOT; EFFICIENT SCHEDULING; LIMITED BUFFERS; MIXED INTEGER PROGRAMMING (MIP); MIXED INTEGER PROGRAMMING MODEL; MULTIPLE MATERIALS; PROCESSING MODULES; SCHEDULING PROBLEM; SEMICONDUCTOR MANUFACTURING; STATE EQUATIONS; TIME CONSTRAINTS; TIMED PETRI NET; TIMED PETRI NETS; TRANSPORTATION ROBOTS;

COMPUTER PROGRAMMING; PETRI NETS; SEMICONDUCTOR DEVICE MANUFACTURE; TOOLS;

SCHEDULING;

EID: 84860664318     PISSN: 08946507     EISSN: None     Source Type: Journal    
DOI: 10.1109/TSM.2011.2180547     Document Type: Article

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