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MRS Bulletin

Volumn 39, Issue 4, 2014, Pages 317-325

Recent advances in focused ion beam technology and applications

(3) Bassim, Nabil a Scott, Keana b Giannuzzi, Lucille A c

a NAVAL RESEARCH LABORATORY (United States)

b NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY (United States)

c EXpressLO LLC (United States)

Author keywords

3D microstructure; Focused ion beam (FIB); Ion solid interactions; Lithography; Scanning electron microscopy (SEM); Tomography

Indexed keywords

CHARACTERIZATION; CHEMICAL ANALYSIS; ION SOURCES; LITHOGRAPHY; SCANNING ELECTRON MICROSCOPY; THREE DIMENSIONAL; TOMOGRAPHY;

3D MICROSTRUCTURES; DETECTOR CONFIGURATION; FOCUSED ION BEAM TECHNOLOGY; ION BEAM MICROSCOPE; ION-SOLID INTERACTIONS; NANOSCALE RESOLUTIONS; PROCESS AUTOMATION; SENSITIVE MATERIALS;

FOCUSED ION BEAMS;

EID: 84898471337 PISSN: 08837694 EISSN: None Source Type: Journal
DOI: 10.1557/mrs.2014.52 Document Type: Article

Times cited : (128)

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