Particle-induced x-ray emission in stainless steel using 30 keV Ga+ focused ion beams

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 27, Issue 4, 2009, Pages 668-671

  Giannuzzi, Lucille A ^a   Gorman, Brian P ^b,c  

^a Thermo Fisher Scientific   (United States)

^b UNIVERSITY OF NORTH TEXAS   (United States)

^c Department of Metallurgical and Materials Engineering   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC NUMBERS; BREMSSTRAHLUNG X-RAYS; CHARACTERISTIC X RAYS; DETECTABILITY; EXPERIMENTAL CONDITIONS; ION-SOLID INTERACTIONS; LOW ENERGIES; PARTICLE INDUCED X-RAY EMISSION; RECOIL EFFECT; SPUTTERED ATOMS; TARGET ATOM; X-RAY EMISSION; X-RAY YIELD;

ATOMS; BEAM PLASMA INTERACTIONS; ELECTROMAGNETIC WAVE EMISSION; ELECTRON BEAMS; FOCUSED ION BEAMS; IONS; MONOLAYERS; STAINLESS STEEL; X RAY SCATTERING; YTTERBIUM COMPOUNDS;

X RAYS;

EID: 67650290317     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.3136852     Document Type: Article

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