Efficient and Precise Sample Preparation by Combination of Pulsed Laser Ablation and FIB Milling

Microscopy and Microanalysis

Volumn 18, Issue , 2012, Pages 636-637

  Salzer, R ^a   Stegmann, H ^a  

^a CARL ZEISS SMT AG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 85008536260     PISSN: 14319276     EISSN: 14358115     Source Type: Journal    
DOI: 10.1017/S143192761200503X     Document Type: Article

References (5)

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2. S. Martens et al., ASME J. Electronic Packaging 131(3) (2009) 1.
3. S. Martens et al., Proc. 11th Int. Euro SimE Conf. (2010).
4. S. Martens et al., PhD Thesis, MEMS Technology and Engineering 16, IMTEK (2011).
5. H. Stegmann et al., Microsc. Microanal. 17 (2011).