Cold atomic beam ion source for focused ion beam applications

Journal of Applied Physics

Volumn 114, Issue 4, 2013, Pages

  Knuffman, B ^a,b,c   Steele, A V ^a,b,c   McClelland, J J ^a  

^a NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

^b UNIVERSITY OF MARYLAND   (United States)

^c ZeroK NanoTech   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ENERGY SPREADS; FOCUSED-ION-BEAM SYSTEM; HIGH BRIGHTNESS; HIGH RESOLUTION; ION-BEAM APPLICATIONS; MEASUREMENTS AND MODELING; MEASUREMENTS OF; MONTE-CARLO SIMULATIONS;

ATOMIC BEAMS; FOCUSED ION BEAMS; INTELLIGENT SYSTEMS; ION SOURCES; IONIZATION;

LUMINANCE;

EID: 84882408187     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.4816248     Document Type: Article

References (29)

1. L. A. Giannuzzi and F. A. Stevie, Introduction to Focused Ion Beams: Instrumentation, Theory, Techniques, and Practice (Springer, 2005).
2. J. M. Chabala, K. K. Soni, J. Li, K. L. Gavrilov, and R. Levi-Setti, Int. J. Mass Spectrom. Ion Process. 143, 191 (1995). 10.1016/0168-1176(94)04119-R
3. L. Scipioni, L. A. Stern, J. Notte, S. Sijbrandij, and B. Griffin, Adv. Mater. Process. 166, 27 (2008).
4. C. W. Hagen, E. Fokkema, and P. Kruit, J. Vac. Sci. Technol. B 26, 2091 (2008). 10.1116/1.2987958
5. L. W. Swanson, G. A. Schwind, and A. E. Bell, J. Appl. Phys. 51, 3453 (1980). 10.1063/1.328197
6. B. W. Ward, J. A. Notte, and N. P. Economou, J. Vac. Sci. Technol. B 24, 2871 (2006). 10.1116/1.2357967
7. B. G. Freinkman, A. V. Eletskii, and S. I. Zaitsev, Microelectron. Eng. 73-74, 139 (2004). 10.1016/S0167-9317(04)00087-5
8. B. J. Claessens, S. B. van der Geer, G. Taban, E. J. D. Vredenbregt, and O. J. Luiten, Phys. Rev. Lett. 95, 164801 (2005). 10.1103/PhysRevLett.95.164801
9. J. L. Hanssen, J. J. McClelland, E. A. Dakin, and M. Jacka, Phys. Rev. 74, 063416 (2006). 10.1103/PhysRevA.74.063416
10. B. J. Claessens, M. P. Reijnders, G. Taban, O. J. Luiten, and E. J. D. Vredenbregt, Phys. Plasmas 14, 093101 (2007). 10.1063/1.2771518
11. J. L. Hanssen, S. B. Hill, J. Orloff, and J. J. McClelland, Nano Lett. 8, 2844 (2008). 10.1021/nl801472n
12. A. V. Steele, B. Knuffman, J. J. McClelland, and J. Orloff, J. Vac. Sci. Technol. B 28, C6F1 (2010). 10.1116/1.3502668
13. B. Knuffman, A. V. Steele, J. Orloff, and J. J. McClelland, New J. Phys. 13, 103035 (2011). 10.1088/1367-2630/13/10/103035
14. S. B. van der Geer, M. P. Reijnders, M. J. de Loos, E. J. D. Vredenbregt, P. H. A. Mutsaers, and O. J. Luiten, J. Appl. Phys. 102, 094312 (2007). 10.1063/1.2804287
15. M. Senoner and W. E. S. Unger, J. Anal. At. Spectrom. 27, 1050 (2012). 10.1039/c2ja30015j
16. J. Nellessen, J. Werner, and W. Ertmer, Opt. Commun. 78, 300 (1990). 10.1016/0030-4018(90)90365-Z
17. C. C. Tsao, Y. Wang, J. Weiner, and V. S. Bagnato, J. Appl. Phys. 80, 8 (1996). 10.1063/1.362774
18. J. G. C. Tempelaars, R. J. W. Stas, P. G. M. Sebel, H. C. W. Beijerinck, and E. J. D. Vredenbregt, Eur. Phys. J. D 18, 113 (2002). 10.1140/e10053-002- 0013-8
19. K. Dieckmann, R. J. C. Spreeuw, M. Weidemüller, and J. T. M. Walraven, Phys. Rev. 58, 3891 (1998). 10.1103/PhysRevA.58.3891
20. Z. T. Lu, K. L. Corwin, M. J. Renn, M. H. Anderson, E. A. Cornell, and C. E. Wieman, Phys. Rev. Lett. 77, 3331 (1996). 10.1103/PhysRevLett.77.3331
21. H. J. Metcalf and P. van der Straten, Laser Cooling and Trapping (Springer, New York, 1999).
22. All uncertainties in this paper are intended to be interpreted as one-standard-deviation, combined standard uncertainty (n.d.).
23. Springer Handbook of Atomic, Molecular, and Optical Physics, 2nd ed., edited by, G. W. F. Drake, (Springer, 2005).
24. P. W. Hawkes and E. Kasper, Principles of Electron Optics (Academic Press, 1996), Vol. 2.
25. O. Maragò, D. Ciampini, F. Fuso, E. Arimondo, C. Gabbanini, and S. T. Manson, Phys. Rev. 57, R4110 (1998). 10.1103/PhysRevA.57.R4110
26. B. M. Patterson, T. Takekoshi, and R. J. Knize, Phys. Rev. 59, 2508 (1999). 10.1103/PhysRevA.59.2508
27. A. V. Steele, B. Knuffman, and J. J. McClelland, J. Appl. Phys. 109, 104308 (2011). 10.1063/1.3585783
28. J. E. Barth and P. Kruit, Optik 101, 101 (1996).
29. M. Drewsen, P. Laurent, A. Nadir, G. Santarelli, A. Clairon, Y. Castin, D. Grison, and C. Salomon, Appl. Phys. B: Lasers Opt. 59, 283 (1994). 10.1007/BF01081396