A FIB micro-sampling technique and a site specific TEM specimen preparation method

Introduction to Focused Ion Beams: Instrumentation, Theory, Techniques and Practice

Volumn , Issue , 2005, Pages 229-245

  Kamino, T ^a   Yaguchi, T ^a   Hashimoto, T ^b   Ohnishi, T ^b   Umemura, K ^a  

^a HITACHI LTD   (Japan)

^b HITACHI HIGH TECHNOLOGIES CORPORATION   (Japan)

Author keywords

FIB micro sampling technique; FIB milling; FIB TEM(STEM) system; Site specific TEM specimen preparation; TEM observation

Indexed keywords

EID: 84892209402     PISSN: None     EISSN: None     Source Type: Book    
DOI: 10.1007/0-387-23313-X_11     Document Type: Chapter

References (15)

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