Ion - Solid interactions

Introduction to Focused Ion Beams: Instrumentation, Theory, Techniques and Practice

Volumn , Issue , 2005, Pages 13-52

  Giannuzzi, Lucille A ^a   Prenitzer, Brenda I ^b   Kempshall, Brian W ^b  

^a Thermo Fisher Scientific   (United States)

^b NanoSpective   (United States)

Author keywords

Amorphization; Backsputtering; Channeling; Incident angle; Ion damage; Ion energy; Ion range; Redeposition; Secondary electron imaging; Secondary ion imaging; Sputtering

Indexed keywords

EID: 77952545814     PISSN: None     EISSN: None     Source Type: Book    
DOI: 10.1007/0-387-23313-X_2     Document Type: Chapter

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