In situ site-specific specimen preparation for atom probe tomography

Ultramicroscopy

Volumn 107, Issue 2-3, 2007, Pages 131-139

  Thompson, K ^a   Lawrence, D ^a   Larson, D J ^a   Olson, J D ^a   Kelly, T F ^a   Gorman, B ^b  

^a Imago Scientific Instruments   (United States)

^b UNIVERSITY OF NORTH TEXAS   (United States)

Author keywords

Atom probe tomography

Indexed keywords

ION BEAMS; ION IMPLANTATION; NANOSTRUCTURED MATERIALS; SILICON WAFERS;

ANNULAR MILL EXTRACTION; ATOM PROBE TOMOGRAPHY; MICROTIP ARRAYS;

TOMOGRAPHY;

GALLIUM; NANOPARTICLE; NICKEL; SILICON;

ARTICLE; ATOM PROBE TOMOGRAPHY; DEVICE; ELECTRIC POTENTIAL; ENERGY; EXTRACTION; QUALITY CONTROL; STANDARDIZATION; TECHNIQUE; TOMOGRAPHY;

EID: 33845659565     PISSN: 03043991     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.ultramic.2006.06.008     Document Type: Article

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