Focused ion beam milling and micromanipulation lift-out for site specific cross-section TEM specimen preparation

Materials Research Society Symposium - Proceedings

Volumn 480, Issue , 1997, Pages 19-27

  Giannuzzi, L A ^a   Drown, J L ^a   Brown, S R ^a   Irwin, R B ^a   Stevie, F A ^a  

^a UNIVERSITY OF CENTRAL FLORIDA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ION BEAMS; SEMICONDUCTOR MATERIALS; SPECIMEN PREPARATION; TRANSMISSION ELECTRON MICROSCOPY;

FOCUSED ION BEAM (FIB) MILLING; MICROMANIPULATION LIFT OUT TECHNIQUES;

MILLING (MACHINING);

EID: 0031335126     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-480-19     Document Type: Conference Paper

References (27)