FIB-SEM cathodoluminescence tomography: Practical and theoretical considerations

Journal of Microscopy

Volumn 243, Issue 3, 2011, Pages 315-326

  De Winter, D A M ^a   Lebbink, M N ^a   De Vries, D F Wiggers ^b   Post, J A ^a   Drury, M R ^a  

^a UTRECHT UNIVERSITY   (Netherlands)

^b VU UNIVERSITY AMSTERDAM   (Netherlands)

Author keywords

Cathodoluminescence; Diamond; Focused ion beam; IMOD; Radiation damage; Reconstruction; Scanning electron microscope; Tomography

Indexed keywords

CATHODOLUMINESCENCE; DIAMONDS; ELECTRONS; FOCUSED ION BEAMS; IMAGE ENHANCEMENT; IMAGE RECONSTRUCTION; IONS; MILLING (MACHINING); SCANNING ELECTRON MICROSCOPY; SURFACE DEFECTS; TOMOGRAPHY;

CATHODOLUMINESCENCE IMAGING; ELECTRON MICROSCOPE TOMOGRAPHIES; FOCUSED IONS BEAMS; IMOD; ION BEAM SCANNING; ION MILLING; NATURAL DIAMONDS; RECONSTRUCTION; SCANNING ELECTRON MICROSCOPE; SCANNING ELECTRONS;

RADIATION DAMAGE;

DIAMOND;

ARTICLE; CATHODOLUMINESCENCE MICROSCOPY; ELECTRON BEAM TOMOGRAPHY; EMISSION TOMOGRAPHY; FEASIBILITY STUDY; FOCUSED ION BEAM SCANNING ELECTRON MICROSCOPE TOMOGRAPHY; GEOMETRY; IMAGE QUALITY; PRIORITY JOURNAL; THREE DIMENSIONAL IMAGING;

EID: 80051471107     PISSN: 00222720     EISSN: 13652818     Source Type: Journal    
DOI: 10.1111/j.1365-2818.2011.03510.x     Document Type: Article

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