High-quality sample preparation by low kV FIB thinning for analytical TEM measurements

Microscopy and Microanalysis

Volumn 13, Issue 2, 2007, Pages 80-86

  Bals, Sara ^a   Tirry, Wim ^a   Geurts, Remco ^b   Zhiqing, Yang ^a   Schryvers, Dominique ^a  

^a UNIVERSITY OF ANTWERP   (Belgium)

^b Thermo Fisher Scientific   (United States)

Author keywords

FIB; Low kV thinning; Multilayer oxides; NiTi; Sample preparation; TEM

Indexed keywords

EID: 34247323541     PISSN: 14319276     EISSN: 14358115     Source Type: Journal    
DOI: 10.1017/S1431927607070018     Document Type: Article

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