Applications of focused ion beam microscopy to materials science specimens

Micron

Volumn 30, Issue 3, 1999, Pages 277-288

  Phaneuf, M W ^a  

^a Fibics Incorporated   (Canada)

Author keywords

FIB; Focused ion beam; Liquid metal ion sources

Indexed keywords

EID: 0033007641     PISSN: 09684328     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0968-4328(99)00012-8     Document Type: Article

References (65)

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