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Volumn 110, Issue 11, 2011, Pages

Analysis of pulsed high-density HBr and Cl 2 plasmas: Impact of the pulsing parameters on the radical densities

Author keywords

[No Author keywords available]

Indexed keywords

BROAD BANDS; CONTINUOUS WAVE; DUTY CYCLES; ETCHING CONDITION; HIGH-DENSITY; ION FLUXES; LOW DUTY-CYCLES; MODULATION FREQUENCIES; MODULATION PARAMETERS; PLASMA CHEMISTRIES; PLASMA CONDITIONS; PULSED PLASMA; PULSING FREQUENCIES; RADICAL DENSITIES; RF-POWER; UV- AND; VACUUM ULTRAVIOLETS;

EID: 84859357929     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3663443     Document Type: Article
Times cited : (44)

References (61)
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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.