Probing radical kinetics in the afterglow of pulsed discharges by absorption spectroscopy with light emitting diodes: Application to BCl radical

Applied Physics Letters

Volumn 94, Issue 2, 2009, Pages

  Vempaire, D ^a   Cunge, G ^a  

^a Laboratoire Interdisciplinaire de Physique   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ABSORPTION; DECAY (ORGANIC); ELECTRIC DISCHARGES; GAS ABSORPTION; GAS DYNAMICS; GASES; LIGHT; LIGHT EMISSION; LIGHT EMITTING DIODES; LIGHT SOURCES; LIGHTING; PLASMAS; SURFACE DISCHARGES;

CHAMBER WALLS; CROSS SECTIONS; DECAY RATES; GAS PHASE; HIGH DENSITIES; LOW COSTS; LOW PRESSURES; POWERFUL APPROACHES; PULSED DISCHARGES; PULSED PLASMAS; RADICAL DENSITIES; RADICAL KINETICS; STICKING COEFFICIENTS; SURFACE LOSSES;

ABSORPTION SPECTROSCOPY;

EID: 58349093790     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3067996     Document Type: Article

References (22)

1. J. P. Booth, G. Hancock, N. D. Perry, and M. J. Toogood, J. Appl. Phys. 0021-8979 10.1063/1.343712 66, 5251 (1989).
2. P. J. Chantry, J. Appl. Phys. 0021-8979 10.1063/1.339662 62, 1141 (1987).
3. J. P. Booth, H. Abada, P. Chabert, and D. B. Graves, Plasma Sources Sci. Technol. 0963-0252 10.1088/0963-0252/14/2/008 14, 273 (2005).
4. G. Cunge, P. Chabert, and J. P. Booth, Plasma Sources Sci. Technol. 0963-0252 10.1088/0963-0252/6/3/012 6, 349 (1997).
5. G. Cunge, P. Chabert, and J. P. Booth, J. Appl. Phys. 0021-8979 10.1063/1.1371940 89, 7750 (2001).
6. H. Abada, P. Chabert, J. P. Booth, and J. Robiche, J. Appl. Phys. 0021-8979 10.1063/1.1505683 92, 4223 (2002).
7. G. Cunge and J. P. Booth, J. Appl. Phys. 0021-8979 10.1063/1.370296 85, 3952 (1999).
8. J. P. Booth, G. Cunge, P. Chabert, and N. Sadeghi, J. Appl. Phys. 0021-8979 10.1063/1.369649 85, 3097 (1999).
9. J. P. Booth, G. Cunge, F. Neuilly, and N. Sadeghi, Plasma Sources Sci. Technol. 0963-0252 10.1088/0963-0252/7/3/021 7, 423 (1998).
10. M. Kogelschatz, G. Cunge, and N. Sadeghi, J. Phys. D 0022-3727 10.1088/0022-3727/37/14/010 37, 1954 (2004).
11. G. Cunge, M. Mori, M. Kogelschatz, and N. Sadeghi, Appl. Phys. Lett. 0003-6951 10.1063/1.2171768 88, 051501 (2006).
12. T. Ohta, M. Ito, Y. Tachibana, S. Taneda, S. Takashima, M. Hori, H. Kano, and S. Den, Appl. Phys. Lett. 0003-6951 10.1063/1.2751104 90, 251502 (2007).
13. H. Ito, K. Teii, H. Funakoshi, M. Hori, M. Goto, and M. Ito, J. Appl. Phys. 0021-8979 10.1063/1.1314307 88, 4537 (2000).
14. H. Nagai, M. Hiramatsu, M. Hori, and M. Goto, Rev. Sci. Instrum. 0034-6748 10.1063/1.1582386 74, 3453 (2003).
15. G. Cunge, D. Vempaire, M. Touzeau, and N. Sadeghi, Appl. Phys. Lett. 0003-6951 10.1063/1.2822448 91, 231503 (2007).
16. R. Ramos, G. Cunge, M. Touzeau, and N. Sadeghi, J. Phys. D 0022-3727 10.1088/0022-3727/41/11/115205 41, 115205 (2008).
17. E. Meeks, P. Ho, A. Ting, and R. J. Buss, J. Vac. Sci. Technol. A 0734-2101 10.1116/1.581332 16, 2227 (1998).
18. G. Cunge, N. Sadeghi, and R. Ramos, J. Appl. Phys. 0021-8979 10.1063/1.2803880 102, 093304 (2007).
19. O. Joubert, G. Cunge, B. Pelissier, L. Vallier, M. Kogelschatz, and E. Pargon, J. Vac. Sci. Technol. A 0734-2101 10.1116/1.1697484 22, 553 (2004).
20. E. Sungauer, E. Pargon, X. Melhaoui, R. Ramos, G. Cunge, L. Vallier, and O. Joubert, J. Vac. Sci. Technol. B 1071-1023 10.1116/1.2781550 25, 1640 (2007).
21. R. Ramos, G. Cunge, and O. Joubert, J. Vac. Sci. Technol. B 1071-1023 10.1116/1.2830637 26, 181 (2008).
22. C. Wang and V. M. Donnelly, J. Vac. Sci. Technol. A 0734-2101 10.1116/1.2938396 26, 597 (2008).