Evolution of ion and electron energy distributions in pulsed helicon plasma discharges

Plasma Sources Science and Technology

Volumn 7, Issue 3, 1998, Pages 337-347

  Conway, G D ^a,b   Perry, A J ^a,c   Boswell, R W ^a  

^a AUSTRALIAN NATIONAL UNIVERSITY   (Australia)

^b CULHAM SCIENCE CENTRE   (United Kingdom)

^c LAM RESEARCH CORPORATION   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC BREAKDOWN OF GASES; ELECTRIC POTENTIAL; ELECTRONS; GLOW DISCHARGES; IONS; PLASMA DIAGNOSTICS;

ELECTRON ENERGY DISTRIBUTION; ION ENERGY DISTRIBUTION; PULSED HELICON PLASMA DISCHARGES;

PLASMAS;

EID: 0032140847     PISSN: 09630252     EISSN: None     Source Type: Journal    
DOI: 10.1088/0963-0252/7/3/012     Document Type: Article

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