Mass and Auger electron spectroscopy studies of the interactions of atomic and molecular chlorine on a plasma reactor wall

Journal of Applied Physics

Volumn 103, Issue 1, 2008, Pages

  Guha, Joydeep ^a   Donnelly, Vincent M ^a   Pu, Yi Kang ^b  

^a UNIVERSITY OF HOUSTON   (United States)

^b TSINGHUA UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

AUGER ELECTRON SPECTROSCOPY; CHLORINE COMPOUNDS; MASS SPECTROMETRY; STOICHIOMETRY;

CONICAL SKIMMERS; PLASMA REACTOR WALLS; PRESSURE RISE MEASUREMENTS;

INDUCTIVELY COUPLED PLASMA;

EID: 38349164719     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2828154     Document Type: Article

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