Vacuum UV broad-band absorption spectroscopy: A powerful diagnostic tool for reactive plasma monitoring

Journal of Physics D: Applied Physics

Volumn 44, Issue 12, 2011, Pages

  Cunge, G ^a   Fouchier, M ^a   Brihoum, M ^a   Bodart, P ^a   Touzeau, M ^a   Sadeghi, N ^a  

^a Laboratoire Interdisciplinaire de Physique   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ABSOLUTE DENSITY; BROAD BANDS; CLOSED SHELLS; DIAGNOSTIC TOOLS; ELECTRONIC TRANSITION; HIGH-DENSITY; ICP PLASMAS; REACTIVE PLASMAS; RYDBERG; SPECTRAL RANGE; UV-VISIBLE; UV-VISIBLE ABSORPTION SPECTROSCOPY; VACUUM UV;

ABSORPTION;

ABSORPTION SPECTROSCOPY;

EID: 79952949677     PISSN: 00223727     EISSN: 13616463     Source Type: Journal    
DOI: 10.1088/0022-3727/44/12/122001     Document Type: Article

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