Dynamics of pulsed-power chlorine plasmas

Journal of Applied Physics

Volumn 86, Issue 9, 1999, Pages 4813-4820

  Malyshev, M V ^a   Donnelly, V M ^a   Colonell, J I ^a   Samukawa, S ^b  

^a LUCENT TECHNOLOGIES   (United States)

^b NEC CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000892949     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.371447     Document Type: Article

References (25)

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