Diagnostics of etching plasmas

Pure and Applied Chemistry

Volumn 74, Issue 3, 2002, Pages 397-400

  Booth, Jean Paul ^a  

^a ECOLE POLYTECHNIQUE   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ABSORPTION SPECTROPHOTOMETRY; ANISOTROPY; CHEMICAL ANALYSIS; CONFERENCE PAPER; EXCITATION AND STIMULATION; ION TRANSPORT; LIGHT ABSORPTION; PHYSICAL PHASE; PRESSURE; PRIORITY JOURNAL; RADIOFREQUENCY;

EID: 0036296946     PISSN: 00334545     EISSN: None     Source Type: Journal    
DOI: 10.1351/pac200274030397     Document Type: Conference Paper

References (13)