Chemical-mechanical polishing

Handbook of Semiconductor Manufacturing Technology, Second Edition

Volumn , Issue , 2007, Pages 17-1-17-55

  Shinn, Gregory B ^a   Korthuis, Vincent ^a   Grover, Gautum ^b   Fang, Simon ^c   Boning, Duane S ^d  

^a TEXAS INSTRUMENTS   (United States)

^b CABOT MICROELECTRONICS CORPORATION   (United States)

^c UNITED MICROELECTRONICS CORPORATION   (Taiwan)

^d Department of Electrical Engineering and Computer Science   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 78649383981     PISSN: None     EISSN: None     Source Type: Book    
DOI: None     Document Type: Chapter

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