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Volumn 14, Issue 9, 1996, Pages
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Using double-sided scrubbing systems for multiple general fab applications
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NONE
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Author keywords
[No Author keywords available]
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Indexed keywords
BRUSHES;
CHEMICAL CLEANING;
CHEMICAL VAPOR DEPOSITION;
LASER APPLICATIONS;
METALLIC FILMS;
OPTIMIZATION;
SEMICONDUCTING FILMS;
SEMICONDUCTOR DEVICE MANUFACTURE;
SILICON WAFERS;
THIN FILMS;
BRUSH CLEANING SYSTEMS;
ELECTRICAL DEFECT DENSITY;
INTERCONNECT SEQUENCE;
PARTICLE MONITOR WAFERS;
PREGATE CLEANING;
SURFACE METALLICS;
SURFACE CLEANING;
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EID: 0030259176
PISSN: 10810595
EISSN: None
Source Type: Journal
DOI: None Document Type: Article |
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Times cited : (3)
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References (7)
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