메뉴 건너뛰기




Volumn 48, Issue 5, 2010, Pages 721-736

Fluidic applications for atomic force microscopy (AFM) with microcantilever sensors

Author keywords

[No Author keywords available]

Indexed keywords

AFM; ELECTRICAL MEASUREMENT TECHNIQUES; FLUID DENSITIES; INTERMOLECULAR FORCES; MEASUREMENT TECHNIQUES; MECHANICAL TRANSDUCERS; MICRO CANTILEVER SENSORS; MICRO-CANTILEVERS; MICRO-SCALES; NANOMECHANICAL CHARACTERIZATION; NANOSCALE FLUIDICS; NANOSCALE TOPOGRAPHY; SENSING APPLICATIONS;

EID: 77952011636     PISSN: 07234864     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00348-010-0830-3     Document Type: Article
Times cited : (29)

References (179)
  • 1
    • 0035365066 scopus 로고    scopus 로고
    • Measurement of solution viscosity by atomic force microscopy
    • DOI 10.1063/1.1368856
    • N Ahmed DF Nino VT Moy 2001 Measurement of solution viscosity by atomic force microscopy Rev Sci Instrum 72 2731 2734 (Pubitemid 33606528)
    • (2001) Review of Scientific Instruments , vol.72 , Issue.6 , pp. 2731-2734
    • Ahmed, N.1    Nino, D.F.2    Moy, V.T.3
  • 2
    • 0038981463 scopus 로고
    • Frequency modulation detection using high-Q cantilevers for enhanced force microscope sensitivity
    • TR Albrecht P Grütter D Horne D Rugar 1991 Frequency modulation detection using high-Q cantilevers for enhanced force microscope sensitivity J Appl Phys 69 668 673
    • (1991) J Appl Phys , vol.69 , pp. 668-673
    • Albrecht, T.R.1    Grütter, P.2    Horne, D.3    Rugar, D.4
  • 6
    • 0035332379 scopus 로고    scopus 로고
    • Simultaneous measurements of density and viscosity of n-pentane from 298 to 383 K and up to 100 MPa pressure using a vibrating-wire instrument
    • F Audonnet AAH Padua 2001 Simultaneous measurements of density and viscosity of n-pentane from 298 to 383 K and up to 100 MPa pressure using a vibrating-wire instrument Fluid Phase Equilibr 181 147 161
    • (2001) Fluid Phase Equilibr , vol.181 , pp. 147-161
    • Audonnet, F.1    Padua, A.A.H.2
  • 8
    • 0036572403 scopus 로고    scopus 로고
    • Energy transfer model for squeeze-film air damping in low vacuum
    • M Bao H Yang H Yin Y Sun 2002 Energy transfer model for squeeze-film air damping in low vacuum J Micromech Microeng 12 341 346
    • (2002) J Micromech Microeng , vol.12 , pp. 341-346
    • Bao, M.1    Yang, H.2    Yin, H.3    Sun, Y.4
  • 9
    • 22944463022 scopus 로고    scopus 로고
    • Laser-cantilever anemometer: A new high-resolution sensor for air and liquid flows
    • S Barth H Koch A Kittel J Peinke J Burgold H Wurmus 2005 Laser-cantilever anemometer: a new high-resolution sensor for air and liquid flows Rev Sci Instrum 76 075110
    • (2005) Rev Sci Instrum , vol.76 , pp. 075110
    • Barth, S.1    Koch, H.2    Kittel, A.3    Peinke, J.4    Burgold, J.5    Wurmus, H.6
  • 10
    • 0001277207 scopus 로고    scopus 로고
    • Viscosity measurements based on experimental investigations of composite cantilever beam eigenfrequencies in viscous media
    • C Bergaud L Nicu 2000 Viscosity measurements based on experimental investigations of composite cantilever beam eigenfrequencies in viscous media Rev Sci Instrum 71 2487 2491
    • (2000) Rev Sci Instrum , vol.71 , pp. 2487-2491
    • Bergaud, C.1    Nicu, L.2
  • 11
    • 0033322290 scopus 로고    scopus 로고
    • Multi-mode air damping analysis of composite cantilever beams
    • C Bergaud L Nicu A Martinez 1999 Multi-mode air damping analysis of composite cantilever beams Jpn J Appl Phys 38 6521 6525
    • (1999) Jpn J Appl Phys , vol.38 , pp. 6521-6525
    • Bergaud, C.1    Nicu, L.2    Martinez, A.3
  • 12
    • 0031072046 scopus 로고    scopus 로고
    • Micromechanics: A toolbox for femtoscale science: "towards a laboratory on a tip"
    • R Berger Gerber Ch HP Lang JK Gimzewski 1997 Micromechanics: a toolbox for femtoscale science: "towards a laboratory on a tip" Microelect Eng 35 373 379
    • (1997) Microelect Eng , vol.35 , pp. 373-379
    • Berger, R.1    Gerber, C.2    Lang, H.P.3    Gimzewski, J.K.4
  • 14
    • 65449149766 scopus 로고    scopus 로고
    • Unified theory of gas damping of flexible microcantilevers at low ambient pressures
    • RA Bidkar RC Tung AA Alexeenko H Sumali A Raman 2009 Unified theory of gas damping of flexible microcantilevers at low ambient pressures Appl Phys Lett 94 163117
    • (2009) Appl Phys Lett , vol.94 , pp. 163117
    • Bidkar, R.A.1    Tung, R.C.2    Alexeenko, A.A.3    Sumali, H.4    Raman, A.5
  • 17
    • 0001453196 scopus 로고    scopus 로고
    • Scanning force microscopy in the dynamic mode using microfabricated capacitive sensors
    • M Blanc J Brugger NF de Rooji U Dürig 1996 Scanning force microscopy in the dynamic mode using microfabricated capacitive sensors J Vac Sci Technol B 14 901 905
    • (1996) J Vac Sci Technol B , vol.14 , pp. 901-905
    • Blanc, M.1    Brugger, J.2    De Rooji, N.F.3    Dürig, U.4
  • 18
  • 19
    • 0002614116 scopus 로고
    • Dependence of the quality factor of micromachined silicon beam resonators on pressure and geometry
    • FR Blom S Bouwstra M Elwenspoek JHJ Fluitman 1992 Dependence of the quality factor of micromachined silicon beam resonators on pressure and geometry J Vac Sci Technol B 10 19 26
    • (1992) J Vac Sci Technol B , vol.10 , pp. 19-26
    • Blom, F.R.1    Bouwstra, S.2    Elwenspoek, M.3    Fluitman, J.H.J.4
  • 20
    • 0033977788 scopus 로고    scopus 로고
    • Environmental sensors based on micromachined cantilevers with integrated read-out
    • A Boisen J Thaysen H Jensenius O Hansen 2000 Environmental sensors based on micromachined cantilevers with integrated read-out Ultramicroscopy 82 11 16
    • (2000) Ultramicroscopy , vol.82 , pp. 11-16
    • Boisen, A.1    Thaysen, J.2    Jensenius, H.3    Hansen, O.4
  • 23
    • 0142057233 scopus 로고    scopus 로고
    • Suspended microchannel resonators for biomolecular detection
    • TP Burg SR Manalis 2003 Suspended microchannel resonators for biomolecular detection Appl Phys Lett 83 2698 2700
    • (2003) Appl Phys Lett , vol.83 , pp. 2698-2700
    • Burg, T.P.1    Manalis, S.R.2
  • 26
    • 66749102084 scopus 로고    scopus 로고
    • Nonmonotonic energy dissipation in microfluidic resonators
    • TP Burg JE Sader SR Manalis 2009 Nonmonotonic energy dissipation in microfluidic resonators Phys Rev Lett 102 228103
    • (2009) Phys Rev Lett , vol.102 , pp. 228103
    • Burg, T.P.1    Sader, J.E.2    Manalis, S.R.3
  • 27
    • 84927762517 scopus 로고
    • Measuring the nanomechanical properties and surface forces of materials using an atomic force microscope
    • NA Burnham RJ Colton 1989 Measuring the nanomechanical properties and surface forces of materials using an atomic force microscope J Vac Sci Technol A 7 2906 2913
    • (1989) J Vac Sci Technol A , vol.7 , pp. 2906-2913
    • Burnham, N.A.1    Colton, R.J.2
  • 28
    • 0030014940 scopus 로고    scopus 로고
    • A sensitive method to measure changes in the surface stress of solids
    • HJ Butt 1996 A sensitive method to measure changes in the surface stress of solids J Colloid Interf Sci 180 251 260
    • (1996) J Colloid Interf Sci , vol.180 , pp. 251-260
    • Butt, H.J.1
  • 32
    • 33745604726 scopus 로고
    • Adsorption-induced surface stress and its effects on resonance frequency of microcantilevers
    • GY Chen T Thundat EA Wachter RJ Warmack 1995 Adsorption-induced surface stress and its effects on resonance frequency of microcantilevers J Appl Phys 77 3618 3622
    • (1995) J Appl Phys , vol.77 , pp. 3618-3622
    • Chen, G.Y.1    Thundat, T.2    Wachter, E.A.3    Warmack, R.J.4
  • 33
    • 79956051277 scopus 로고    scopus 로고
    • Determination of adsorption-induced variation in the spring constant of a microcantilever
    • S Cherian T Thundat 2002 Determination of adsorption-induced variation in the spring constant of a microcantilever Appl Phys Lett 80 2219 2221
    • (2002) Appl Phys Lett , vol.80 , pp. 2219-2221
    • Cherian, S.1    Thundat, T.2
  • 34
    • 0032072690 scopus 로고    scopus 로고
    • Micromechanical properties of elastic polymeric materials as probed by scanning force microscopy
    • SA Chizhik Z Huang VV Gorbunov NK Myshkin VV Tsukruk 1998 Micromechanical properties of elastic polymeric materials as probed by scanning force microscopy Langmuir 14 2606 2609
    • (1998) Langmuir , vol.14 , pp. 2606-2609
    • Chizhik, S.A.1    Huang, Z.2    Gorbunov, V.V.3    Myshkin, N.K.4    Tsukruk, V.V.5
  • 35
    • 0000892453 scopus 로고    scopus 로고
    • Experimental validation of theoretical models for the frequency response of atomic force microscope cantilever beams immersed in fluids
    • JWM Chon P Mulvaney JE Sader 2000 Experimental validation of theoretical models for the frequency response of atomic force microscope cantilever beams immersed in fluids J Appl Phys 87 3978 3988
    • (2000) J Appl Phys , vol.87 , pp. 3978-3988
    • Chon, J.W.M.1    Mulvaney, P.2    Sader, J.E.3
  • 36
    • 0020927101 scopus 로고
    • Air and gas damping of quartz tuning forks
    • 689871
    • M Christen 1983 Air and gas damping of quartz tuning forks Sens Actuators 4 555 564 689871
    • (1983) Sens Actuators , vol.4 , pp. 555-564
    • Christen, M.1
  • 37
    • 0011006839 scopus 로고
    • The theory of oscillating-vane vacuum gauges
    • RG Christian 1966 The theory of oscillating-vane vacuum gauges Vacuum 16 175 178
    • (1966) Vacuum , vol.16 , pp. 175-178
    • Christian, R.G.1
  • 38
    • 0005110970 scopus 로고
    • Vibration of fully submerged cantilever plates in water
    • South-west Research Institute, San Antonio, Texas
    • Chu WH (1963) Vibration of fully submerged cantilever plates in water. Technical report no. 2. DTMB, South-west Research Institute, San Antonio, Texas
    • (1963) Technical Report No. 2. DTMB
    • Chu, W.H.1
  • 41
    • 0027540056 scopus 로고
    • A nondestructive method for determining the spring constant of cantilevers for scanning force microscopy
    • JP Cleveland S Manne D Bocek PK Hansma 1993 A nondestructive method for determining the spring constant of cantilevers for scanning force microscopy Rev Sci Instrum 64 403 405
    • (1993) Rev Sci Instrum , vol.64 , pp. 403-405
    • Cleveland, J.P.1    Manne, S.2    Bocek, D.3    Hansma, P.K.4
  • 42
    • 27544507496 scopus 로고    scopus 로고
    • An image processing and optimal nonlinear filtering technique for particle image velocimetry of microflows
    • Cummings EB (2000) An image processing and optimal nonlinear filtering technique for particle image velocimetry of microflows. Exp Fluids Suppl S42-S50
    • (2000) Exp Fluids Suppl
    • Cummings, E.B.1
  • 43
    • 0035624664 scopus 로고    scopus 로고
    • A new instrument to perform simultaneous measurements of density and viscosity of fluids by a dual vibrating-wire technique
    • JLCG da Mata JMNA Fareleira CMBP Oliveira FJP Caetano WA Wakeham 2001 A new instrument to perform simultaneous measurements of density and viscosity of fluids by a dual vibrating-wire technique High Temp High Press 33 669 676
    • (2001) High Temp High Press , vol.33 , pp. 669-676
    • Mata Jlcg, D.1    Jmna, F.2    Cmbp, O.3    Caetano, F.J.P.4    Wakeham, W.A.5
  • 44
    • 0036231598 scopus 로고    scopus 로고
    • Determination of elastic moduli of thin layers of soft material using the atomic force microscope
    • EK Dimitriadis F Horkay J Maresca B Kachar RS Chadwick 2002 Determination of elastic moduli of thin layers of soft material using the atomic force microscope Biophys J 82 2798 2810
    • (2002) Biophys J , vol.82 , pp. 2798-2810
    • Dimitriadis, E.K.1    Horkay, F.2    Maresca, J.3    Kachar, B.4    Chadwick, R.S.5
  • 45
    • 27944497333 scopus 로고    scopus 로고
    • Tissue cells feel and respond to the stiffness of their substrate
    • DE Discher P Janmey Y-L Wang 2005 Tissue cells feel and respond to the stiffness of their substrate Science 310 1139 1143
    • (2005) Science , vol.310 , pp. 1139-1143
    • Discher, D.E.1    Janmey, P.2    Wang, Y.-L.3
  • 46
    • 0004796024 scopus 로고
    • A vibrating wire densimeter for measurements in fluids at high pressures
    • M Dix JMNA Fareleira Y Takaishi WA Wakeham 1991 A vibrating wire densimeter for measurements in fluids at high pressures Int J Thermophys 12 357 370
    • (1991) Int J Thermophys , vol.12 , pp. 357-370
    • Dix, M.1    Jmna, F.2    Takaishi, Y.3    Wakeham, W.A.4
  • 47
    • 0032499609 scopus 로고    scopus 로고
    • Measuring the elastic properties of thin polymer films with the atomic force microscope
    • J Domke M Radmacher 1998 Measuring the elastic properties of thin polymer films with the atomic force microscope Langmuir 14 3320 3325
    • (1998) Langmuir , vol.14 , pp. 3320-3325
    • Domke, J.1    Radmacher, M.2
  • 49
    • 0000451445 scopus 로고    scopus 로고
    • Eigenfrequencies of a rectangular atomic force microscope cantilever in a medium
    • F-J Elmer M Dreier 1997 Eigenfrequencies of a rectangular atomic force microscope cantilever in a medium J Appl Phys 81 7709 7714
    • (1997) J Appl Phys , vol.81 , pp. 7709-7714
    • Elmer, F.-J.1    Dreier, M.2
  • 50
    • 33747152561 scopus 로고    scopus 로고
    • Matrix elasticity directs stem cell lineage specification
    • AJ Engler S Sen HL Sweeney DE Discher 2006 Matrix elasticity directs stem cell lineage specification Cell 126 677 689
    • (2006) Cell , vol.126 , pp. 677-689
    • Engler, A.J.1    Sen, S.2    Sweeney, H.L.3    Discher, D.E.4
  • 51
    • 1842698276 scopus 로고
    • Application of lead zirconate titanate thin film displacement sensors for the atomic force microscope
    • T Fujii S Watanabe M Suzuki T Fujiu 1995 Application of lead zirconate titanate thin film displacement sensors for the atomic force microscope J Vac Sci Technol B 13 1119 1122
    • (1995) J Vac Sci Technol B , vol.13 , pp. 1119-1122
    • Fujii, T.1    Watanabe, S.2    Suzuki, M.3    Fujiu, T.4
  • 56
    • 0029637281 scopus 로고
    • Atomic resolution of the silicon (111)-(7×7) surface by atomic force microscopy
    • FJ Giessibl 1995 Atomic resolution of the silicon (111)-(7×7) surface by atomic force microscopy Science 267 68 71
    • (1995) Science , vol.267 , pp. 68-71
    • Giessibl, F.J.1
  • 57
    • 0141990921 scopus 로고    scopus 로고
    • Advances in atomic force microscopy
    • FJ Giessibl 2003 Advances in atomic force microscopy Rev Mod Phys 75 949 983
    • (2003) Rev Mod Phys , vol.75 , pp. 949-983
    • Giessibl, F.J.1
  • 58
    • 33845285884 scopus 로고    scopus 로고
    • Exploring the nanoworld with atomic force microscopy
    • FJ Giessibl CF Quate 2006 Exploring the nanoworld with atomic force microscopy Phys Today 59 44 50
    • (2006) Phys Today , vol.59 , pp. 44-50
    • Giessibl, F.J.1    Quate, C.F.2
  • 60
    • 34648840567 scopus 로고    scopus 로고
    • Measuring the mass, density, and size of particles and cells using a suspended microchannel resonator
    • M Godin AK Bryan TP Burg K Babcock SR Manalis 2007 Measuring the mass, density, and size of particles and cells using a suspended microchannel resonator Appl Phys Lett 91 123121
    • (2007) Appl Phys Lett , vol.91 , pp. 123121
    • Godin, M.1    Bryan, A.K.2    Burg, T.P.3    Babcock, K.4    Manalis, S.R.5
  • 62
    • 29144455300 scopus 로고    scopus 로고
    • Frequency response of cantilever beams immersed in viscous fluids near a solid surface with applications to the atomic force microscope
    • CP Green JE Sader 2005 Frequency response of cantilever beams immersed in viscous fluids near a solid surface with applications to the atomic force microscope J Appl Phys 98 114913
    • (2005) J Appl Phys , vol.98 , pp. 114913
    • Green, C.P.1    Sader, J.E.2
  • 63
    • 69549111335 scopus 로고    scopus 로고
    • The chemical structure of a molecule resolved by atomic force microscopy
    • L Gross F Mohn N Moll P Liljeroth G Meyer 2009 The chemical structure of a molecule resolved by atomic force microscopy Science 325 1110 1114
    • (2009) Science , vol.325 , pp. 1110-1114
    • Gross, L.1    Mohn, F.2    Moll, N.3    Liljeroth, P.4    Meyer, G.5
  • 64
    • 0037201873 scopus 로고    scopus 로고
    • Dependence of the resonance frequency of thermally excited microcantilever resonators on temperature
    • J Han C Zhu J Liu Y He 2002 Dependence of the resonance frequency of thermally excited microcantilever resonators on temperature Sens Actuators A 101 37 41
    • (2002) Sens Actuators A , vol.101 , pp. 37-41
    • Han, J.1    Zhu, C.2    Liu, J.3    He, Y.4
  • 65
    • 1842604701 scopus 로고
    • Frequency shift on a micromachined resonator excited photothermally in vacuum
    • K Hane T Iwatuki S Inaba S Okuma 1992 Frequency shift on a micromachined resonator excited photothermally in vacuum Rev Sci Instrum 63 3781 3782
    • (1992) Rev Sci Instrum , vol.63 , pp. 3781-3782
    • Hane, K.1    Iwatuki, T.2    Inaba, S.3    Okuma, S.4
  • 66
    • 26644435999 scopus 로고    scopus 로고
    • Microcantilever biosensors
    • KM Hansen T Thundat 2005 Microcantilever biosensors Methods 37 57 64
    • (2005) Methods , vol.37 , pp. 57-64
    • Hansen, K.M.1    Thundat, T.2
  • 68
    • 0033121032 scopus 로고    scopus 로고
    • Spatially resolved force spectroscopy of biological surfaces using the atomic force microscope
    • WF Heinz JH Hoh 1999 Spatially resolved force spectroscopy of biological surfaces using the atomic force microscope Trends Biotechnol 17 143 150
    • (1999) Trends Biotechnol , vol.17 , pp. 143-150
    • Heinz, W.F.1    Hoh, J.H.2
  • 69
    • 0011731723 scopus 로고
    • Size effect of a quartz oscillator on its characteristics as a friction vacuum gauge
    • M Hirata K Kokubun M Ono K Nakayama 1985 Size effect of a quartz oscillator on its characteristics as a friction vacuum gauge J Vac Sci Technol A 3 1742 1745
    • (1985) J Vac Sci Technol A , vol.3 , pp. 1742-1745
    • Hirata, M.1    Kokubun, K.2    Ono, M.3    Nakayama, K.4
  • 70
    • 0029313835 scopus 로고
    • Damping characteristics of beam-shaped micro-oscillators
    • H Hosaka K Itao S Kuroda 1995 Damping characteristics of beam-shaped micro-oscillators Sens Actuators A 49 87 95
    • (1995) Sens Actuators A , vol.49 , pp. 87-95
    • Hosaka, H.1    Itao, K.2    Kuroda, S.3
  • 71
    • 10844268965 scopus 로고    scopus 로고
    • On the squeeze-film damping of micro-resonators in the free-molecular regime
    • S Hutcherson W Ye 2004 On the squeeze-film damping of micro-resonators in the free-molecular regime J Micromech Microeng 14 1726 1733
    • (2004) J Micromech Microeng , vol.14 , pp. 1726-1733
    • Hutcherson, S.1    Ye, W.2
  • 72
    • 0031145754 scopus 로고    scopus 로고
    • A vibrating-tube flow densitometer for measurements with corrosive solutions at temperatures up to 723 K and pressures up to 40 MPa
    • V Hynek M Obsil V Majer J Quint JPE Grolier 1997 A vibrating-tube flow densitometer for measurements with corrosive solutions at temperatures up to 723 K and pressures up to 40 MPa Int J Thermophys 18 719 732
    • (1997) Int J Thermophys , vol.18 , pp. 719-732
    • Hynek, V.1    Obsil, M.2    Majer, V.3    Quint, J.4    Grolier, J.P.E.5
  • 73
    • 84953681277 scopus 로고
    • Resonance frequency shifts of a photothermal vibration in vacuum
    • S Inaba K Hane 1991 Resonance frequency shifts of a photothermal vibration in vacuum J Vac Sci Technol A 9 2138 2139
    • (1991) J Vac Sci Technol A , vol.9 , pp. 2138-2139
    • Inaba, S.1    Hane, K.2
  • 74
    • 84957135484 scopus 로고
    • Resonance frequency of a photothermal vibration for a polyethylene thin plate in medium vacuum region
    • S Inaba K Hane 1991 Resonance frequency of a photothermal vibration for a polyethylene thin plate in medium vacuum region J Vac Sci Technol A 9 3173 3174
    • (1991) J Vac Sci Technol A , vol.9 , pp. 3173-3174
    • Inaba, S.1    Hane, K.2
  • 75
    • 0000513744 scopus 로고
    • Photothermal vibration for a membrane in water
    • S Inaba K Hane 1992 Photothermal vibration for a membrane in water J Appl Phys 71 3631 3632
    • (1992) J Appl Phys , vol.71 , pp. 3631-3632
    • Inaba, S.1    Hane, K.2
  • 76
    • 0026880415 scopus 로고
    • Liquid density sensing by using photothermal vibration
    • S Inaba Y Okuhara K Hane 1992 Liquid density sensing by using photothermal vibration Sens Actuators A 33 163 166
    • (1992) Sens Actuators A , vol.33 , pp. 163-166
    • Inaba, S.1    Okuhara, Y.2    Hane, K.3
  • 77
    • 0000561827 scopus 로고
    • Analysis of the resonance characteristics of a cantilever vibrated photothermally in a liquid
    • S Inaba K Akaishi T Mori K Hane 1993 Analysis of the resonance characteristics of a cantilever vibrated photothermally in a liquid J Appl Phys 73 2654 2658
    • (1993) J Appl Phys , vol.73 , pp. 2654-2658
    • Inaba, S.1    Akaishi, K.2    Mori, T.3    Hane, K.4
  • 78
    • 47649089006 scopus 로고    scopus 로고
    • Using electric actuation and detection of oscillations in microcantilevers for pressure measurements
    • G Keskar B Elliot J Gaillard MJ Skove AM Rao 2008 Using electric actuation and detection of oscillations in microcantilevers for pressure measurements Sens Actuators A 147 203 209
    • (2008) Sens Actuators A , vol.147 , pp. 203-209
    • Keskar, G.1    Elliot, B.2    Gaillard, J.3    Skove, M.J.4    Rao, A.M.5
  • 79
    • 33747143433 scopus 로고    scopus 로고
    • Experimental verification of the temperature effects on Sader's model for multilayered cantilevers immersed in an aqueous medium
    • S Kim KD Kihm 2006 Experimental verification of the temperature effects on Sader's model for multilayered cantilevers immersed in an aqueous medium Appl Phys Lett 89 061918
    • (2006) Appl Phys Lett , vol.89 , pp. 061918
    • Kim, S.1    Kihm, K.D.2
  • 80
    • 39749146701 scopus 로고    scopus 로고
    • Full-field and real-time SPR imaging thermometry
    • IT Kim KD Kihm 2007 Full-field and real-time SPR imaging thermometry Opt Lett 32 3456 3458
    • (2007) Opt Lett , vol.32 , pp. 3456-3458
    • Kim, I.T.1    Kihm, K.D.2
  • 81
    • 33847218577 scopus 로고    scopus 로고
    • Temperature dependence of the near-wall oscillation of microcantilevers submerged in liquid environment
    • S Kim KD Kihm 2007 Temperature dependence of the near-wall oscillation of microcantilevers submerged in liquid environment Appl Phys Lett 90 081908
    • (2007) Appl Phys Lett , vol.90 , pp. 081908
    • Kim, S.1    Kihm, K.D.2
  • 82
    • 51349116867 scopus 로고    scopus 로고
    • Effect of adsorption-induced surface stress change on the stiffness of a microcantilever used as a salinity detection sensor
    • S Kim KD Kihm 2008 Effect of adsorption-induced surface stress change on the stiffness of a microcantilever used as a salinity detection sensor Appl Phys Lett 93 081911
    • (2008) Appl Phys Lett , vol.93 , pp. 081911
    • Kim, S.1    Kihm, K.D.2
  • 83
    • 0043123161 scopus 로고    scopus 로고
    • Examination of ratiometric laser induced fluorescence thermometry for microscale spatial measurement resolution
    • HJ Kim KD Kihm JS Allen 2003 Examination of ratiometric laser induced fluorescence thermometry for microscale spatial measurement resolution Int J Heat Mass Transfer 46 3967 3974
    • (2003) Int J Heat Mass Transfer , vol.46 , pp. 3967-3974
    • Kim, H.J.1    Kihm, K.D.2    Allen, J.S.3
  • 84
    • 39749188099 scopus 로고    scopus 로고
    • Near-field thermometry sensor based on the thermal resonance of a microcantilever in aqueous medium
    • S Kim KC Kim KD Kihm 2007 Near-field thermometry sensor based on the thermal resonance of a microcantilever in aqueous medium Sensors 7 3156 3165
    • (2007) Sensors , vol.7 , pp. 3156-3165
    • Kim, S.1    Kim, K.C.2    Kihm, K.D.3
  • 87
    • 56349129579 scopus 로고    scopus 로고
    • Surface elasticity and charge concentration-dependent endothelial cell attachment to copolymer polyelectrolyte hydrogel
    • S Kim AE English KD Kihm 2009 Surface elasticity and charge concentration-dependent endothelial cell attachment to copolymer polyelectrolyte hydrogel Acta Biomater 5 144 151
    • (2009) Acta Biomater , vol.5 , pp. 144-151
    • Kim, S.1    English, A.E.2    Kihm, K.D.3
  • 88
    • 0000999206 scopus 로고    scopus 로고
    • The influence of a viscous fluid on the vibration dynamics of scanning near-field optical microscopy fiber probes and atomic force microscopy cantilevers
    • S Kirstein M Mertesdorf M Schönhoff 1998 The influence of a viscous fluid on the vibration dynamics of scanning near-field optical microscopy fiber probes and atomic force microscopy cantilevers J Appl Phys 84 1782 1790
    • (1998) J Appl Phys , vol.84 , pp. 1782-1790
    • Kirstein, S.1    Mertesdorf, M.2    Schönhoff, M.3
  • 89
    • 0000588891 scopus 로고
    • A bending and stretching mode crystal oscillator as a friction vacuum gauge
    • K Kokubun M Hirata H Murakami Y Toda M Ono 1984 A bending and stretching mode crystal oscillator as a friction vacuum gauge Vacuum 34 731 735
    • (1984) Vacuum , vol.34 , pp. 731-735
    • Kokubun, K.1    Hirata, M.2    Murakami, H.3    Toda, Y.4    Ono, M.5
  • 91
    • 0030170028 scopus 로고    scopus 로고
    • Pressure dependence of resonance characteristics of the microcantilever fabricated from optical fiber
    • H Kumazaki S Inaba K Hane 1996 Pressure dependence of resonance characteristics of the microcantilever fabricated from optical fiber Vacuum 47 475 477
    • (1996) Vacuum , vol.47 , pp. 475-477
    • Kumazaki, H.1    Inaba, S.2    Hane, K.3
  • 92
    • 34249884202 scopus 로고    scopus 로고
    • In situ real-time monitoring of biomolecular interactions based on resonating microcantilevers immersed in a viscous fluid
    • TY Kwon K Eom JH Park DS Yoon TS Kim HL Lee 2007 In situ real-time monitoring of biomolecular interactions based on resonating microcantilevers immersed in a viscous fluid Appl Phys Lett 90 223903
    • (2007) Appl Phys Lett , vol.90 , pp. 223903
    • Kwon, T.Y.1    Eom, K.2    Park, J.H.3    Yoon, D.S.4    Kim, T.S.5    Lee, H.L.6
  • 93
    • 36249021006 scopus 로고    scopus 로고
    • Effect of surface stress on the stiffness of cantilever plates
    • MJ Lachut JE Sader 2007 Effect of surface stress on the stiffness of cantilever plates Phys Rev Lett 99 206102
    • (2007) Phys Rev Lett , vol.99 , pp. 206102
    • Lachut, M.J.1    Sader, J.E.2
  • 94
    • 0036801166 scopus 로고    scopus 로고
    • Nanomechanics from atomic resolution to molecular recognition based on atomic force microscopy technology
    • HP Lang M Hegner E Meyer Gerber Ch 2002 Nanomechanics from atomic resolution to molecular recognition based on atomic force microscopy technology Nanotechnology 13 R29 R36
    • (2002) Nanotechnology , vol.13
    • Lang, H.P.1    Hegner, M.2    Meyer, E.3    Gerber, C.4
  • 96
    • 3843119792 scopus 로고    scopus 로고
    • Cantilever transducers as a platform for chemical and biological sensors
    • NV Lavrik MJ Sepaniak PG Datskos 2004 Cantilever transducers as a platform for chemical and biological sensors Rev Sci Instrum 75 2229 2253
    • (2004) Rev Sci Instrum , vol.75 , pp. 2229-2253
    • Lavrik, N.V.1    Sepaniak, M.J.2    Datskos, P.G.3
  • 97
    • 67349133885 scopus 로고    scopus 로고
    • Advanced particle-based velocimetry techniques for microscale flows
    • SJ Lee S Kim 2009 Advanced particle-based velocimetry techniques for microscale flows Microfluid Nanofluid 6 577 588
    • (2009) Microfluid Nanofluid , vol.6 , pp. 577-588
    • Lee, S.J.1    Kim, S.2
  • 98
    • 0030103510 scopus 로고    scopus 로고
    • Self-excited piezoelectric cantilever oscillators
    • SS Lee RM White 1996 Self-excited piezoelectric cantilever oscillators Sens Actuators A 52 41 45
    • (1996) Sens Actuators A , vol.52 , pp. 41-45
    • Lee, S.S.1    White, R.M.2
  • 99
    • 3843049583 scopus 로고    scopus 로고
    • Characterization of resonant behavior and sensitivity using micromachined PZT cantilever
    • JH Lee KH Yoon TS Kim 2002 Characterization of resonant behavior and sensitivity using micromachined PZT cantilever Integr Ferroelectron 50 43 52
    • (2002) Integr Ferroelectron , vol.50 , pp. 43-52
    • Lee, J.H.1    Yoon, K.H.2    Kim, T.S.3
  • 100
    • 44849088777 scopus 로고    scopus 로고
    • Temperature-dependent thermomechanical noise spectra of doped silicon microcantilevers
    • J Lee F Goericke WP King 2008 Temperature-dependent thermomechanical noise spectra of doped silicon microcantilevers Sens Actuators A 145-146 37 43
    • (2008) Sens Actuators A , vol.145-146 , pp. 37-43
    • Lee, J.1    Goericke, F.2    King, W.P.3
  • 101
    • 68249133861 scopus 로고    scopus 로고
    • Effects of gold patterning on the bending profile and frequency response of a microcantilever
    • D Lee S Kim N Jung T Thundat S Jeon 2009 Effects of gold patterning on the bending profile and frequency response of a microcantilever J Appl Phys 106 024310
    • (2009) J Appl Phys , vol.106 , pp. 024310
    • Lee, D.1    Kim, S.2    Jung, N.3    Thundat, T.4    Jeon, S.5
  • 102
    • 0002754621 scopus 로고
    • Elastic vibration characteristics of cantilever plates in water
    • US Lindholm DD Kana WH Chu HN Abramson 1965 Elastic vibration characteristics of cantilever plates in water J Ship Res 9 11 36
    • (1965) J Ship Res , vol.9 , pp. 11-36
    • Lindholm, U.S.1    Kana, D.D.2    Chu, W.H.3    Abramson, H.N.4
  • 103
    • 17144414941 scopus 로고    scopus 로고
    • Infrared micro-particle image velocimetry in silicon-based microdevices
    • D Liu SV Garimella ST Wereley 2005 Infrared micro-particle image velocimetry in silicon-based microdevices Exp Fluids 38 385 392
    • (2005) Exp Fluids , vol.38 , pp. 385-392
    • Liu, D.1    Garimella, S.V.2    Wereley, S.T.3
  • 104
    • 33749159181 scopus 로고    scopus 로고
    • Surface stress effects on the resonance properties of cantilever sensors
    • P Lu HP Lee C Lu SJ O'Shea 2005 Surface stress effects on the resonance properties of cantilever sensors Phys Rev B 72 085405
    • (2005) Phys Rev B , vol.72 , pp. 085405
    • Lu, P.1    Lee, H.P.2    Lu, C.3    O'Shea, S.J.4
  • 106
    • 20544448056 scopus 로고
    • Thermal imaging using the atomic force microscope
    • A Majumdar JP Carrejo J Lai 1993 Thermal imaging using the atomic force microscope Appl Phy Lett 62 2501 2503
    • (1993) Appl Phy Lett , vol.62 , pp. 2501-2503
    • Majumdar, A.1    Carrejo, J.P.2    Lai, J.3
  • 107
  • 108
    • 4244085510 scopus 로고
    • Magnetic imaging by "force microscopy" with 1000 - Resolution
    • Y Martin HK Wickramasinghe 1987 Magnetic imaging by "force microscopy" with 1000 resolution Appl Phys Lett 50 1455 1457
    • (1987) Appl Phys Lett , vol.50 , pp. 1455-1457
    • Martin, Y.1    Wickramasinghe, H.K.2
  • 109
    • 0141503495 scopus 로고    scopus 로고
    • Quartz crystal microbalance: A useful tool for studying thin polymer films and complex biomolecular systems at the solution-surface interface
    • KA Marx 2003 Quartz crystal microbalance: a useful tool for studying thin polymer films and complex biomolecular systems at the solution-surface interface Biomacromolecules 4 1099 1120
    • (2003) Biomacromolecules , vol.4 , pp. 1099-1120
    • Marx, K.A.1
  • 110
    • 9744235108 scopus 로고    scopus 로고
    • Nanoscale velocity-drag force relationship in thin liquid layers measured by atomic force microscopy
    • A Mechler B Piorek R Lal S Banerjee 2004 Nanoscale velocity-drag force relationship in thin liquid layers measured by atomic force microscopy Appl Phys Lett 85 3881 3883
    • (2004) Appl Phys Lett , vol.85 , pp. 3881-3883
    • Mechler, A.1    Piorek, B.2    Lal, R.3    Banerjee, S.4
  • 113
    • 36549096102 scopus 로고
    • Novel optical approach to atomic force microscopy
    • G Meyer NM Amer 1988 Novel optical approach to atomic force microscopy Appl Phys Lett 53 1045 1047
    • (1988) Appl Phys Lett , vol.53 , pp. 1045-1047
    • Meyer, G.1    Amer, N.M.2
  • 114
    • 0037240859 scopus 로고    scopus 로고
    • Dynamic response of a cantilever in liquid near a solid wall
    • T Naik EK Longmire SC Mantell 2003 Dynamic response of a cantilever in liquid near a solid wall Sens Actuators A 102 240 254
    • (2003) Sens Actuators A , vol.102 , pp. 240-254
    • Naik, T.1    Longmire, E.K.2    Mantell, S.C.3
  • 115
    • 0028428810 scopus 로고
    • Buried piezoresistive sensors by means of MeV ion implantation
    • T Nishimoto S Shoji M Esashi 1994 Buried piezoresistive sensors by means of MeV ion implantation Sens Actuators A 43 249 253
    • (1994) Sens Actuators A , vol.43 , pp. 249-253
    • Nishimoto, T.1    Shoji, S.2    Esashi, M.3
  • 116
    • 0007994272 scopus 로고
    • Scanning probe microscopy of thermal conductivity and subsurface properties
    • M Nonnenmacher HK Wickramasinghe 1992 Scanning probe microscopy of thermal conductivity and subsurface properties Appl Phys Lett 61 168 170
    • (1992) Appl Phys Lett , vol.61 , pp. 168-170
    • Nonnenmacher, M.1    Wickramasinghe, H.K.2
  • 117
    • 0032704734 scopus 로고    scopus 로고
    • Commercial quartz crystal microbalances-theory and applications
    • CK O'Sullivan GG Guilbault 1999 Commercial quartz crystal microbalances-theory and applications Biosens Bioelectron 14 663 670
    • (1999) Biosens Bioelectron , vol.14 , pp. 663-670
    • O'Sullivan, C.K.1    Guilbault, G.G.2
  • 121
    • 0028404067 scopus 로고
    • A vibrating-wire densimeter for liquids at high pressures: The density of 2, 2, 4-trimethylpentane from 298.15 to 348.15 K and up to 100 MPa
    • AAH Padua JMNA Fareleira JCG Calado WA Wakeham 1994 A vibrating-wire densimeter for liquids at high pressures: the density of 2, 2, 4-trimethylpentane from 298.15 to 348.15 K and up to 100 MPa Int J Thermophys 15 229 243
    • (1994) Int J Thermophys , vol.15 , pp. 229-243
    • Padua, A.A.H.1    Jmna, F.2    Calado, J.C.G.3    Wakeham, W.A.4
  • 123
    • 3142690382 scopus 로고    scopus 로고
    • Optically sliced micro-PIV using confocal laser scanning microscopy (CLSM)
    • JS Park CK Choi KD Kihm 2004 Optically sliced micro-PIV using confocal laser scanning microscopy (CLSM) Exp Fluids 37 105 119
    • (2004) Exp Fluids , vol.37 , pp. 105-119
    • Park, J.S.1    Choi, C.K.2    Kihm, K.D.3
  • 124
    • 21344465199 scopus 로고    scopus 로고
    • Temperature measurement for a nanoparticle suspension by detecting the Brownian motion using optical serial sectioning microscopy (OSSM)
    • JS Park CK Choi KD Kihm 2005 Temperature measurement for a nanoparticle suspension by detecting the Brownian motion using optical serial sectioning microscopy (OSSM) Meas Sci Technol 16 1418 1429
    • (2005) Meas Sci Technol , vol.16 , pp. 1418-1429
    • Park, J.S.1    Choi, C.K.2    Kihm, K.D.3
  • 125
    • 0012694678 scopus 로고    scopus 로고
    • Near-field acoustic densimeter and viscosimeter
    • R Patois P Vairac B Cretin 2000 Near-field acoustic densimeter and viscosimeter Rev Sci Instrum 71 3860 3863
    • (2000) Rev Sci Instrum , vol.71 , pp. 3860-3863
    • Patois, R.1    Vairac, P.2    Cretin, B.3
  • 126
    • 0344912596 scopus 로고    scopus 로고
    • Cell locomotion and focal adhesions are regulated by substrate flexibility
    • RJ Pelham Y-L Wang 1997 Cell locomotion and focal adhesions are regulated by substrate flexibility Proc Natl Acad Sci USA 94 13661 13665
    • (1997) Proc Natl Acad Sci USA , vol.94 , pp. 13661-13665
    • Pelham, R.J.1    Wang, Y.-L.2
  • 127
    • 23844467463 scopus 로고    scopus 로고
    • Moore's law in homeland defense: An integrated sensor platform based on silicon microcantilevers
    • LA Pinnaduwage HF Ji T Thundat 2005 Moore's law in homeland defense: an integrated sensor platform based on silicon microcantilevers IEEE Sensors J 5 774 785
    • (2005) IEEE Sensors J , vol.5 , pp. 774-785
    • Pinnaduwage, L.A.1    Ji, H.F.2    Thundat, T.3
  • 131
    • 33750431001 scopus 로고    scopus 로고
    • Piezoresistive cantilever based nanoflow and viscosity sensor for microchannels
    • A Quist A Chand S Ramachandran D Cohen R Lal 2006 Piezoresistive cantilever based nanoflow and viscosity sensor for microchannels Lab Chip 6 1450 1454
    • (2006) Lab Chip , vol.6 , pp. 1450-1454
    • Quist, A.1    Chand, A.2    Ramachandran, S.3    Cohen, D.4    Lal, R.5
  • 133
    • 33845197706 scopus 로고    scopus 로고
    • Origin of the response of nanomechanical resonators to bacteria adsorption
    • D Ramos J Tamayo J Mertens M Calleja A Zaballos 2006 Origin of the response of nanomechanical resonators to bacteria adsorption J Appl Phys 100 106105
    • (2006) J Appl Phys , vol.100 , pp. 106105
    • Ramos, D.1    Tamayo, J.2    Mertens, J.3    Calleja, M.4    Zaballos, A.5
  • 134
    • 34948876394 scopus 로고    scopus 로고
    • Measurement of the mass and rigidity of adsorbates on a microcantilever sensor
    • D Ramos M Calleja J Mertens A Zaballos J Tamayo 2007 Measurement of the mass and rigidity of adsorbates on a microcantilever sensor Sensors 7 1834 1845
    • (2007) Sensors , vol.7 , pp. 1834-1845
    • Ramos, D.1    Calleja, M.2    Mertens, J.3    Zaballos, A.4    Tamayo, J.5
  • 135
    • 38649111667 scopus 로고    scopus 로고
    • Detection of bacteria based on the thermomechanical noise of a nanomechanical resonator: Origin of the response and detection limits
    • D Ramos J Tamayo J Mertens M Calleja LG Villanueva A Zaballos 2008 Detection of bacteria based on the thermomechanical noise of a nanomechanical resonator: origin of the response and detection limits Nanotechnology 19 035503
    • (2008) Nanotechnology , vol.19 , pp. 035503
    • Ramos, D.1    Tamayo, J.2    Mertens, J.3    Calleja, M.4    Villanueva, L.G.5    Zaballos, A.6
  • 136
    • 35348982230 scopus 로고    scopus 로고
    • PEMC-based method of measuring DNA hybridization at femtomolar concentration directly in human serum and in the presence of copious noncomplementary strands
    • K Rijal R Mutharasan 2007 PEMC-based method of measuring DNA hybridization at femtomolar concentration directly in human serum and in the presence of copious noncomplementary strands Anal Chem 79 7392 7400
    • (2007) Anal Chem , vol.79 , pp. 7392-7400
    • Rijal, K.1    Mutharasan, R.2
  • 139
    • 0030573852 scopus 로고    scopus 로고
    • Distance-dependent noise measurements in scanning force microscopy
    • A Roters D Johannsmann 1996 Distance-dependent noise measurements in scanning force microscopy J Phys Condens Matter 8 7561 7577
    • (1996) J Phys Condens Matter , vol.8 , pp. 7561-7577
    • Roters, A.1    Johannsmann, D.2
  • 140
    • 11944250146 scopus 로고
    • Atomic force microscopy
    • D Rugar P Hansma 1990 Atomic force microscopy Phys Today 43 23 30
    • (1990) Phys Today , vol.43 , pp. 23-30
    • Rugar, D.1    Hansma, P.2
  • 141
    • 0032109073 scopus 로고    scopus 로고
    • Frequency response of cantilever beams immersed in viscous fluids with applications to the atomic force microscope
    • JE Sader 1998 Frequency response of cantilever beams immersed in viscous fluids with applications to the atomic force microscope J Appl Phys 84 64 76
    • (1998) J Appl Phys , vol.84 , pp. 64-76
    • Sader, J.E.1
  • 142
    • 0002425732 scopus 로고    scopus 로고
    • Whole field measurement of temperature in water using two-color laser induced fluorescence
    • J Sakakibara RJ Adrian 1999 Whole field measurement of temperature in water using two-color laser induced fluorescence Exp Fluids 26 7 15
    • (1999) Exp Fluids , vol.26 , pp. 7-15
    • Sakakibara, J.1    Adrian, R.J.2
  • 143
  • 144
    • 22544465608 scopus 로고    scopus 로고
    • Temperature and pressure dependence of resonance in multi-layer microcantilevers
    • R Sandberg W Svendsen K Mølhave A Boisen 2005 Temperature and pressure dependence of resonance in multi-layer microcantilevers J Micromech Microeng 15 1454 1458
    • (2005) J Micromech Microeng , vol.15 , pp. 1454-1458
    • Sandberg, R.1    Svendsen, W.2    Mølhave, K.3    Boisen, A.4
  • 147
    • 39049090069 scopus 로고    scopus 로고
    • Nanosensors for trace explosive detection
    • L Senesac T Thundat 2008 Nanosensors for trace explosive detection Mater Today 11 28 36
    • (2008) Mater Today , vol.11 , pp. 28-36
    • Senesac, L.1    Thundat, T.2
  • 148
    • 26444492607 scopus 로고    scopus 로고
    • Nanoscale imaging of buried structures via scanning near-field ultrasound holography
    • GS Shekhawat VP Dravid 2005 Nanoscale imaging of buried structures via scanning near-field ultrasound holography Science 310 89 92
    • (2005) Science , vol.310 , pp. 89-92
    • Shekhawat, G.S.1    Dravid, V.P.2
  • 149
    • 33645085279 scopus 로고    scopus 로고
    • MOSFET-embedded microcantilevers for measuring deflection in biomolecular sensors
    • GS Shekhawat S-H Tark VP Dravid 2006 MOSFET-embedded microcantilevers for measuring deflection in biomolecular sensors Science 311 1592 1595
    • (2006) Science , vol.311 , pp. 1592-1595
    • Shekhawat, G.S.1    Tark, S.-H.2    Dravid, V.P.3
  • 151
    • 0001101438 scopus 로고    scopus 로고
    • Scanning thermal microscopy of carbon nanotubes using batch-fabricated probes
    • L Shi S Plyasunov A Bachtold PL McEuen A Majumdar 2000 Scanning thermal microscopy of carbon nanotubes using batch-fabricated probes Appl Phys Lett 77 4295 4297
    • (2000) Appl Phys Lett , vol.77 , pp. 4295-4297
    • Shi, L.1    Plyasunov, S.2    Bachtold, A.3    McEuen, P.L.4    Majumdar, A.5
  • 152
    • 0001599569 scopus 로고    scopus 로고
    • Simultaneous liquid viscosity and density determination with piezoelectric unimorph cantilevers
    • WY Shih X Li H Gu W-H Shih IA Aksay 2001 Simultaneous liquid viscosity and density determination with piezoelectric unimorph cantilevers J Appl Phys 89 1497 1505
    • (2001) J Appl Phys , vol.89 , pp. 1497-1505
    • Shih, W.Y.1    Li, X.2    Gu, H.3    Shih, W.-H.4    Aksay, I.A.5
  • 154
    • 10844243464 scopus 로고    scopus 로고
    • Microscale flow visualization
    • D Sinton 2004 Microscale flow visualization Microfluid Nanofluid 1 2 21
    • (2004) Microfluid Nanofluid , vol.1 , pp. 2-21
    • Sinton, D.1
  • 155
    • 41849151140 scopus 로고    scopus 로고
    • Making it stick: Convection, reaction and diffusion in surface-based biosensors
    • TM Squires RJ Messinger SR Manalis 2008 Making it stick: convection, reaction and diffusion in surface-based biosensors Nature Biotechnol 26 417 426
    • (2008) Nature Biotechnol , vol.26 , pp. 417-426
    • Squires, T.M.1    Messinger, R.J.2    Manalis, S.R.3
  • 156
    • 0348175886 scopus 로고
    • Deposition and imaging of localized charge on insulator surfaces using a force microscope
    • JE Stern BD Terris HJ Mamin D Rugar 1988 Deposition and imaging of localized charge on insulator surfaces using a force microscope Appl Phys Lett 53 2717 2719
    • (1988) Appl Phys Lett , vol.53 , pp. 2717-2719
    • Stern, J.E.1    Terris, B.D.2    Mamin, H.J.3    Rugar, D.4
  • 157
    • 0030092040 scopus 로고    scopus 로고
    • Micromachined silicon cantilever paddles with piezoresistive readout for flow sensing
    • Y Su AGR Evans A Brunnschweiler 1996 Micromachined silicon cantilever paddles with piezoresistive readout for flow sensing J Micromech Microeng 6 69 72
    • (1996) J Micromech Microeng , vol.6 , pp. 69-72
    • Su, Y.1    Evans, A.G.R.2    Brunnschweiler, A.3
  • 158
    • 0036851953 scopus 로고    scopus 로고
    • Characterization of a highly sensitive ultra-thin piezoresistive silicon cantilever probe and its application in gas flow velocity sensing
    • Y Su AGR Evans A Brunnschweiler G Ensell 2002 Characterization of a highly sensitive ultra-thin piezoresistive silicon cantilever probe and its application in gas flow velocity sensing J Micromech Microeng 12 780 785
    • (2002) J Micromech Microeng , vol.12 , pp. 780-785
    • Su, Y.1    Evans, A.G.R.2    Brunnschweiler, A.3    Ensell, G.4
  • 159
    • 33751556466 scopus 로고    scopus 로고
    • Effect of the adsorbate stiffness on the resonance response of microcantilever sensors
    • J Tamayo D Ramos J Mertens M Calleja 2006 Effect of the adsorbate stiffness on the resonance response of microcantilever sensors Appl Phys Lett 89 224104
    • (2006) Appl Phys Lett , vol.89 , pp. 224104
    • Tamayo, J.1    Ramos, D.2    Mertens, J.3    Calleja, M.4
  • 161
    • 34547239174 scopus 로고
    • Thermal and ambient-induced deflections of scanning force microscope cantilevers
    • T Thundat RJ Warmack GY Chen DP Allison 1994 Thermal and ambient-induced deflections of scanning force microscope cantilevers Appl Phys Lett 64 2894 2896
    • (1994) Appl Phys Lett , vol.64 , pp. 2894-2896
    • Thundat, T.1    Warmack, R.J.2    Chen, G.Y.3    Allison, D.P.4
  • 163
    • 21544472129 scopus 로고
    • Atomic resolution with an atomic force microscope using piezoresistive detection
    • M Tortonese RC Barrett CF Quate 1993 Atomic resolution with an atomic force microscope using piezoresistive detection Appl Phys Lett 62 834 836
    • (1993) Appl Phys Lett , vol.62 , pp. 834-836
    • Tortonese, M.1    Barrett, R.C.2    Quate, C.F.3
  • 166
    • 33845725243 scopus 로고    scopus 로고
    • Resonant frequencies of a rectangular cantilever beam immersed in a fluid
    • CA Van Eysden JE Sader 2006 Resonant frequencies of a rectangular cantilever beam immersed in a fluid J Appl Phys 100 114916
    • (2006) J Appl Phys , vol.100 , pp. 114916
    • Van Eysden, C.A.1    Sader, J.E.2
  • 167
    • 33847665548 scopus 로고    scopus 로고
    • Frequency response of cantilever beams immersed in viscous fluids with applications to the atomic force microscope: Arbitrary mode order
    • CA Van Eysden JE Sader 2007 Frequency response of cantilever beams immersed in viscous fluids with applications to the atomic force microscope: arbitrary mode order J Appl Phys 101 044908
    • (2007) J Appl Phys , vol.101 , pp. 044908
    • Van Eysden, C.A.1    Sader, J.E.2
  • 168
    • 70450235008 scopus 로고    scopus 로고
    • Frequency response of cantilever beams immersed in compressible fluids with applications to the atomic force microscope
    • CA Van Eysden JE Sader 2009 Frequency response of cantilever beams immersed in compressible fluids with applications to the atomic force microscope J Appl Phys 106 094904
    • (2009) J Appl Phys , vol.106 , pp. 094904
    • Van Eysden, C.A.1    Sader, J.E.2
  • 169
    • 34748835764 scopus 로고    scopus 로고
    • Micro- and nanomechanical sensors for environmental, chemical, and biological detection
    • PS Waggoner HG Craighead 2007 Micro- and nanomechanical sensors for environmental, chemical, and biological detection Lab Chip 7 1238 1255
    • (2007) Lab Chip , vol.7 , pp. 1238-1255
    • Waggoner, P.S.1    Craighead, H.G.2
  • 170
    • 33847345055 scopus 로고    scopus 로고
    • Ultrasensitive biochemical sensors based on microcantilevers of atomic force microscope
    • C Wang D Wang Y Mao X Hu 2007 Ultrasensitive biochemical sensors based on microcantilevers of atomic force microscope Anal Biochem 363 1 11
    • (2007) Anal Biochem , vol.363 , pp. 1-11
    • Wang, C.1    Wang, D.2    Mao, Y.3    Hu, X.4
  • 171
    • 0035497987 scopus 로고    scopus 로고
    • Viscosity measurements on gaseous propane
    • J Wilhelm E Vogel 2001 Viscosity measurements on gaseous propane J Chem Eng Data 46 1467 1471
    • (2001) J Chem Eng Data , vol.46 , pp. 1467-1471
    • Wilhelm, J.1    Vogel, E.2
  • 172
    • 0037418433 scopus 로고    scopus 로고
    • Directed movement of vascular smooth muscle cells on gradient-compliant hydrogels
    • JY Wong A Velasco P Rajagopalan Q Pham 2003 Directed movement of vascular smooth muscle cells on gradient-compliant hydrogels Langmuir 19 1908 1913
    • (2003) Langmuir , vol.19 , pp. 1908-1913
    • Wong, J.Y.1    Velasco, A.2    Rajagopalan, P.3    Pham, Q.4
  • 173
    • 33645662673 scopus 로고    scopus 로고
    • Viscous damping of microresonators for gas composition analysis
    • Y Xu JT Lin BW Alphenaar RS Keynton 2006 Viscous damping of microresonators for gas composition analysis Appl Phys Lett 88 143513
    • (2006) Appl Phys Lett , vol.88 , pp. 143513
    • Xu, Y.1    Lin, J.T.2    Alphenaar, B.W.3    Keynton, R.S.4
  • 175
    • 27144526612 scopus 로고    scopus 로고
    • The wide variety of possible applications of micro-thermofluid control
    • H Yosida 2005 The wide variety of possible applications of micro-thermofluid control Microfluid Nanofluid 1 289 300
    • (2005) Microfluid Nanofluid , vol.1 , pp. 289-300
    • Yosida, H.1
  • 176
    • 1842437126 scopus 로고    scopus 로고
    • Particle velocity field measurements in a near-wall flow using evanescent wave illumination
    • CM Zettner M Yoda 2003 Particle velocity field measurements in a near-wall flow using evanescent wave illumination Exp Fluids 34 115 121
    • (2003) Exp Fluids , vol.34 , pp. 115-121
    • Zettner, C.M.1    Yoda, M.2
  • 177
    • 0027610690 scopus 로고
    • Fractured polymer/silica fiber surface studied by tapping mode atomic force microscopy
    • Q Zhong D Innis K Kjoller VB Elings 1993 Fractured polymer/silica fiber surface studied by tapping mode atomic force microscopy Surf Sci Lett 290 L688 L692
    • (1993) Surf Sci Lett , vol.290
    • Zhong, Q.1    Innis, D.2    Kjoller, K.3    Elings, V.B.4
  • 178
    • 14844362642 scopus 로고    scopus 로고
    • Cantilever-based biosensors
    • C Ziegler 2004 Cantilever-based biosensors Anal Bioanal Chem 379 946 959
    • (2004) Anal Bioanal Chem , vol.379 , pp. 946-959
    • Ziegler, C.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.