Dependence of the resonance frequency of thermally excited microcantilever resonators on temperature

Sensors and Actuators, A: Physical

Volumn 101, Issue 1-2, 2002, Pages 37-41

  Han, Jianqiang ^a   Zhu, Changchun ^a   Liu, Junhua ^a   He, Yongning ^a  

^a XI'AN JIAOTONG UNIVERSITY   (China)

Author keywords

Induced mass; Microcantilever; Resonator; Thermal excitation

Indexed keywords

MATHEMATICAL MODELS; NATURAL FREQUENCIES; RESONATORS; THERMAL CONDUCTIVITY;

MICROCANTILEVER RESONATORS; THERMAL EXCITATION;

MICROELECTROMECHANICAL DEVICES;

EID: 0037201873     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(02)00146-2     Document Type: Article

References (14)

1. M.J. Tudor, M.V. Andres, J.M. Naden, Silicon resonator sensors: interrogation techniques and characteristics, IEE Proc. 135 (5) (1988) 364-369.
2. D. Chun, W. Yuelin, Y. Hao, All-optical type silicon microresonators with pigtail, Chinese J. Semiconductors 20 (2) (1999) 128-134 (in Chinese).
3. Y.J. Rao, B. Culshaw, Comparison between optically excited vibrations of silicon cantilever and bridge microresonators, Sens. Actuators A 30 (1992) 203-208.
4. J.D. Zook, D.W. Burns, H. Guckel, Characteristics of polysilicon resonant microbeams, Sens. Actuators A 35 (1992) 51-59.
5. L. Bingqian, Studies on resonant devices and theory of MEMS, The doctor's degree thesis of Xi'an Jiatong University, Xi'an, China, 2000 (in Chinese).
6. F.R. Blom, S. Bouwstra, M. Elwenspoek, J.H.J. Fluitman, Dependence of the quality factor of micromachined silicon beam resonators on pressure and geometry, J. Vac. Sci. Technol. B 10 (1) (1992) 19-26.
7. H. Hosaka, K. Itao, S. Kuroda, Damping characteristics of beam-shaped micro-oscillators, Sens. Actuators A 49 (1995) 87-95.
8. K.E. Petersen, C.R. Guarnieri, Young's modulus measurement of thin films using micromechanics, J. Appl. Phys. 50 (1979) 6761-6766.
9. S. Chengxiang, The Theory, Design and Application of Sensors, The publishing company of national defence industry, Beijing (in Chinese).
10. EMIS Datareviews Series No. 4, Properties of Silicon, INSPEC. London, 1988.
11. H.J. Mcskimin, Measurement of elastic constants at low temperature by means of ultrasonic waves data for silicon and germanium single crystals and for fused sili J. Appl. Phys. 24 (1953) 988-997.
12. W. Fang, H.C. Tsai, C.Y. Lo, Determining thermal expansion coefficients of thin film using micromachined cantilevers, Sens. Actuators A 77 (1999) 21-27.
13. K. Petersen, Silicon as a mechanical materials, Proc. IEEE Electron devices 70 (5) (1982) 420-457.
14. D. Walsh, B. Culshaw, Optically activated silicon microresonator transducers: an assessment of material properties, Sens. Actuators A 25/27 (1991) 711-716.