Corrigendum to "Using electric actuation and detection of oscillations in microcantilevers for pressure measurements" [Sensors and Actuators A: Physical (2008) 203-209] (DOI:10.1016/j.sna.2008.04.017);Using electric actuation and detection of oscillations in microcantilevers for pressure measurements

Sensors and Actuators, A: Physical

Volumn 147, Issue 1, 2008, Pages 203-209

  Keskar, Gayatri ^a   Elliott, Bevan ^a   Gaillard, Jay ^a   Skove, Malcolm J ^a   Rao, Apparao M ^a  

^a South   (United States)

Author keywords

Electrostatic; Gas environments; Harmonic resonance; Microcantilever; Pressure; Q factor

Indexed keywords

CHEMICAL SENSORS; ELECTROSTATIC ACTUATORS; ELECTROSTATICS; HARMONIC ANALYSIS; NANOCANTILEVERS; NATURAL FREQUENCIES; PRESSURE; PRESSURE MEASUREMENT; Q FACTOR MEASUREMENT;

ELECTRICAL DETECTION; ELECTROSTATIC ACTUATION; GAS ENVIRONMENT; HARMONIC RESONANCE; MICRO-CANTILEVERS; Q-FACTORS; RESPONSE CHARACTERISTIC; THEORETICAL CALCULATIONS;

COMPOSITE MICROMECHANICS;

EID: 47649089006     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2008.08.015     Document Type: Erratum

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