Characterization of resonant behavior and sensitivity using micromachined PZT cantilever

Integrated Ferroelectrics

Volumn 50, Issue , 2002, Pages 43-52

  Lee, Jeong Hoon ^a,b   Yoon, Ki Hyun ^b   Kim, Tae Song ^a  

^a Korea Institute of Science and Technology   (South Korea)

^b Yonsei University   (South Korea)

Author keywords

Cantilever; Electromechanical; MEMS; Piezoelectric; PZT; Sensitivity

Indexed keywords

GRAVIMETRIC ANALYSIS; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; SENSITIVITY ANALYSIS;

ELECTROMECHANICAL CHARACTERISTICS; GRAVIMETRIC SENSITIVITY; MICROMACHINED PIEZOELECTRIC CANTILEVERS; PZT CANTILEVERS;

PIEZOELECTRIC DEVICES;

EID: 3843049583     PISSN: 10584587     EISSN: 16078489     Source Type: Journal    
DOI: 10.1080/743817705     Document Type: Article

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