Silicon resonant microcantilevers for absolute pressure measurement

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 24, Issue 4, 2006, Pages 1803-1809

  Bianco, S ^a   Cocuzza, M ^a   Ferrero, S ^a   Giuri, E ^a   Piacenza, G ^a   Pirri, C F ^a   Ricci, A ^a   Scaltrito, L ^a   Bich, D ^b   Merialdo, A ^b   Schina, P ^b   Correale, R ^c  

^a POLITECNICO DI TORINO   (Italy)

^b Olivetti I Jet   (Italy)

^c Fratelli Varian 54   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

MICROELECTRONICS; MICROSTRUCTURE; PRESSURE MEASUREMENT; QUALITY ASSURANCE; RESONANT CIRCUITS; SENSITIVITY ANALYSIS;

ABSOLUTE PRESSURE MEASUREMENT; QUALITY FACTOR; RESONANCE FREQUENCY; SILICON RESONANT MICROCANTILEVERS;

SEMICONDUCTING SILICON;

EID: 33746491712     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2214698     Document Type: Article

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