Pressure dependence of resonance characteristics of the microcantilever fabricated from optical fiber

Vacuum

Volumn 47, Issue 6-8, 1996, Pages 475-477

  Kumazaki, H ^a   Inabaa, S ^a   Hane, K ^b  

^a GIFU NATIONAL COLLEGE OF TECHNOLOGY   (Japan)

^b TOHOKU UNIVERSITY   (Japan)

Author keywords

Optical fiber; Photomechanical sensor; Photothermal vibration; Quartz core microstructure; Vacuum gauge

Indexed keywords

ETCHING; MICROELECTROMECHANICAL DEVICES; OPTICAL FIBER FABRICATION; OPTICAL SYSTEMS; OSCILLATORS (ELECTRONIC); PRESSURE EFFECTS; PRESSURE TRANSDUCERS; QUARTZ; RESONANCE; SEMICONDUCTOR LASERS; THERMAL EFFECTS; VIBRATIONS (MECHANICAL);

MICROCANTILEVER; PHOTOMECHANICAL SENSOR; PHOTOTHERMAL VIBRATION; PRESSURE DEPENDENCE; QUARTZ CORE MICROSTRUCTURE; TEMPERATURE DEPENDENCE;

VACUUM GAGES;

EID: 0030170028     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/0042-207x(96)00146-7     Document Type: Article

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