Unified theory of gas damping of flexible microcantilevers at low ambient pressures

Applied Physics Letters

Volumn 94, Issue 16, 2009, Pages

  Bidkar, Rahul A ^a   Tung, Ryan C ^a   Alexeenko, Alina A ^b   Sumali, Hartono ^c   Raman, Arvind ^a  

^a PURDUE UNIVERSITY   (United States)

^b Purdue University   (United States)

^c SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AMBIENT PRESSURES; CLOSED FORMS; CONTINUUM MODELS; FOUR ORDERS; GAS DAMPING; KNUDSEN NUMBERS; LOW PRESSURES; MICRO-CANTILEVERS; MOLECULAR THEORIES; SILICON MICROCANTILEVERS; SLIP FLOW REGIMES; UNIFIED THEORIES; VIBRATION MODES;

BOLTZMANN EQUATION; COMPOSITE MICROMECHANICS; CONTINUUM MECHANICS; DAMPING; GASES; REFLECTIVE COATINGS;

CHEMICAL SENSORS;

EID: 65449149766     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3122933     Document Type: Article

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