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Diamond and Related Materials

Volumn 13, Issue 11-12, 2004, Pages 1980-1983

Vibratory response of diamond-like amorphous carbon cantilevers under different temperatures

(8) Chua, Daniel H C a Tay, B K b Zhang, P b Teo, E H T b Lim, L T W c O'Shea, S c Miao, J d Milne, W I a

a UNIVERSITY OF CAMBRIDGE (United Kingdom)

b NANYANG TECHNOLOGICAL UNIVERSITY (Singapore)

c INSTITUTE OF MATERIALS RESEARCH AND ENGINEERING (Singapore)

d NANYANG TECHNOLOGICAL UNIVERSITY (Singapore)

Author keywords

Annealing; Diamond like amorphous carbon; DLC microcantilevers; Intrinsic stress; Microcantilevers; Resonance frequency

Indexed keywords

ANNEALING; ELASTIC MODULI; ELECTRIC INSULATION; ION IMPLANTATION; LITHOGRAPHY; MICROELECTROMECHANICAL DEVICES; MULTILAYERS; NATURAL FREQUENCIES; THERMAL EFFECTS; TRIBOLOGY; WEAR RESISTANCE;

DIAMOND-LIKE AMORPHOUS CARBON; DLC MICROCANTILEVERS; INTRINSIC STRESS; MICROCANTILEVERS;

DIAMOND LIKE CARBON FILMS;

EID: 7544241301 PISSN: 09259635 EISSN: None Source Type: Journal
DOI: 10.1016/j.diamond.2004.08.002 Document Type: Conference Paper

Times cited : (4)

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