Novel nanoscale thermal property imaging technique: The 2ω method. I. Principle and the 2ω signal measurement

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 24, Issue 5, 2006, Pages 2398-2404

  Roh, Hee Hwan ^a   Lee, Joon Sik ^a   Kim, Dong Lib ^b   Park, Jisang ^b   Kim, Kyeongtae ^b   Kwon, Ohmyoung ^b   Park, Seung Ho ^c   Choi, Young Ki ^d   Majumdar, Arun ^e  

^a Seoul National University   (South Korea)

^b Korea University   (South Korea)

^c Hong Ik University   (South Korea)

^d Chung Ang University   (South Korea)

^e UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

SIGNAL MEASUREMENT; TEMPERATURE SENSORS; THERMAL PROPERTY IMAGING TECHNIQUE; THERMOELECTRIC PROBES;

ELECTRIC HEATING; NANOTECHNOLOGY; OPTICAL RESOLVING POWER; OSCILLATIONS; PROBES; SENSORS; THERMODYNAMIC PROPERTIES; THERMOELECTRICITY;

IMAGING TECHNIQUES;

EID: 33749371056     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2353842     Document Type: Article

References (11)

1. D. G. Cahill, W. K. Ford, K. E. Goodson, G. D. Mahan, A. Majumdar, H. J. Maris, R. Merlin, and S. R. Phillpot, J. Appl. Phys. 93, 793 (2003).
2. D. G. Cahill, K. Goodson, and A. Majumdar, J. Heat Transfer 124, 223 (2002).
3. H. M. Pollock and A. Hammiche, J. Phys. D 34, 23 (2001).
4. L. Shi, O. Kwon, A. C. Miner, and A. Majumdar, J. Microelectromech. Syst. 10, 370 (2001).
5. A. Hammiche, D. J. Hourston, H. M. Pollock, M. Reading, and M. Song, J. Vac. Sci. Technol. B 14, 1486 (1996).
6. A. Hammiche et al., J. Vac. Sci. Technol. B 18, 1322 (2000).
7. E. Oesterschulze, M. Stopka, L. Ackermann, W. Scholz, and S. Werner, J. Vac. Sci. Technol. B 14, 832 (1996).
8. O. Kwon, L. Shi, and A. Majumdar, J. Heat Transfer 125, 156 (2003).
9. I. K. Moon, D. H. Jung, K. B. Lee, and Y. H. Jeong, J. Appl. Phys. 76, 2451 (2000).
10. H. S. Carslaw and J. C. Jaeger, Conduction of Heat in Solids, 2nd ed. (Oxford University Press, Oxford, 1959).
11. D. G. On, D. H. Jung, K. B. Lee, and Y. H. Jeong, J. Appl. Phys. 76, 2451 (2000).