Thermal effects on coated resonant microcantilevers

Sensors and Actuators, A: Physical

Volumn 95, Issue 1, 2001, Pages 17-23

  Shen, F ^a   Lu, P ^a   O'Shea S J ^b   Lee, K H ^a   Ng, T Y ^a  

^a INSTITUTE OF HIGH PERFORMANCE COMPUTING   (Singapore)

^b INSTITUTE OF MATERIALS RESEARCH AND ENGINEERING   (Singapore)

Author keywords

Microcantilever; Resonance frequency; Temperature dependence; Thermal drift; Thermal mismatch

Indexed keywords

COATINGS; EQUATIONS OF MOTION; GOLD; NATURAL FREQUENCIES; SILICON; TEMPERATURE DISTRIBUTION; THERMAL EFFECTS; THERMAL EXPANSION; THIN FILMS;

FREQUENCY SHIFT; MICROCANTILEVERS; TEMPERATURE DEPENDENCE; THERMAL DRIFT; THERMAL MISMATCH;

MICROSENSORS;

EID: 0035893257     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(01)00715-4     Document Type: Article

References (13)

1. Resonant silicon structures
2. Measurement of elastic constants at low temperatures by means of ultrasonic waves-data for silicon and germanium single crystals, and for fused silica
3. Elastic moduli of silicon vs. hydrostatic pressure at 25.0 and -195.8°C
4. Silicon resonator sensors: Interrogation techniques and characteristics
5. Resonant silicon sensor
6. Electrothermally excited silicon beam mechanical resonators
7. A balanced resonant pressure sensor
8. Residual stresses in surface coatings and their effects on interfacial debonding
9. The Dynamics of Arches and Frames
10. Exact solutions for the analysis of general elastically restrained non-uniform beams
11. Sequential position readout from arrays of micromechanical cantilever sensors
12. Measurement of elastic constants at low temperature by means of ultrasonic waves-data for silicon and germanium single crystals, and for fused silica