Novel nanoscale thermal property imaging technique: The 2ω method. II. Demonstration and comparison

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 24, Issue 5, 2006, Pages 2405-2411

  Roh, Hee Hwan ^a   Lee, Joon Sik ^a   Kim, Dong Lib ^b   Park, Jisang ^b   Kim, Kyeongtae ^b   Kwon, Ohmyoung ^b   Park, Seung Ho ^c   Choi, Young Ki ^d   Majumdar, Arun ^e  

^a Seoul National University   (South Korea)

^b Korea University   (South Korea)

^c Hong Ik University   (South Korea)

^d Chung Ang University   (South Korea)

^e UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

NANOSCALE SPATIAL RESOLUTION; NANOSCALE THERMAL PROPERTY IMAGING; THERMOCOUPLE JUNCTIONS; THERMOELECTRIC PROBES;

ELECTRIC HEATING; NANOTECHNOLOGY; OPTICAL RESOLVING POWER; PROBES; THERMOCOUPLES; THERMODYNAMIC PROPERTIES; THERMOELECTRICITY;

IMAGING TECHNIQUES;

EID: 33749356530     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2353843     Document Type: Article

References (6)

1. D. G. Cahill, Rev. Sci. Instrum. 61, 802 (1990).
2. L. Shi, O. Kwon, A. C. Miner, and A. Majumdar, J. Microelectromech. Syst. 10, 370 (2001).
3. L. Shi and A. Majumdar, J. Heat Transfer 124, 329 (2002).
4. K. Luo, Z. Shi, J. Varesi, and A. Majumdar, J. Vac. Sci. Technol. B 15, 349 (1997).
5. A. Majumdar, Annu. Rev. Mater. Sci. 29, 505 (1999).
6. A. I. Buzin, P. Kamasa, M. Pyda, and B. Wunderlich, Thermochim. Acta 381, 9 (2002).