Effect of adsorption-induced surface stress change on the stiffness of a microcantilever used as a salinity detection sensor

Applied Physics Letters

Volumn 93, Issue 8, 2008, Pages

  Kim, S ^a   Kihm, K D ^a  

^a UNIVERSITY OF TENNESSEE   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ADSORPTION; COMPOSITE MICROMECHANICS; METAL IONS; STIFFNESS; SURFACE PROPERTIES;

DETECTION SENSORS; EFFECT OF ADSORPTIONS; EXPERIMENTAL EXAMINATION; HYDRODYNAMIC LOADING; MICRO-CANTILEVERS; STIFFNESS CHANGES; SURFACE ADSORPTION; VACUUM ENVIRONMENT;

STRESS ANALYSIS;

EID: 51349116867     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2976749     Document Type: Article

References (23)

1. R. Raiteri, M. Grattarola, H. J. Butt, and P. Skladal, Sens. Actuators B 0925-4005 10.1016/S0925-4005(01)00856-5 79, 115 (2001).
2. N. V. Lavrik, M. J. Sepaniak, and P. G. Datskos, Rev. Sci. Instrum. 0034-6748 10.1063/1.1763252 75, 2229 (2004).
3. C. Wang, D. Wang, Y. Mao, and X. Hu, Anal. Biochem. 0003-2697 10.1016/j.ab.2006.12.010 363, 1 (2007).
4. T. Thundat, E. A. Wachter, S. L. Sharp, and R. J. Warmack, Appl. Phys. Lett. 0003-6951 10.1063/1.113896 66, 1695 (1995).
5. G. Y. Chen, T. Thundat, E. A. Wachter, and R. J. Warmack, J. Appl. Phys. 0021-8979 10.1063/1.359562 77, 3618 (1995).
6. J. Fritz, M. K. Baller, H. P. Lang, H. Rothuizen, P. Vettiger, E. Meyer, H. J. Guntherodt, Ch. Gerber, and J. K. Gimzewski, Science 0036-8075 10.1126/science.288.5464.316 288, 316 (2000).
7. Z. Hu, T. Thundat, and R. J. Warmack, J. Appl. Phys. 0021-8979 10.1063/1.1378333 90, 427 (2001).
8. D. W. Dareing and T. Thundat, J. Appl. Phys. 0021-8979 10.1063/1.1853496 97, 043526 (2005).
9. G. Huang, W. Gao, and S. Yu, Appl. Phys. Lett. 0003-6951 10.1063/1.2236102 89, 043506 (2006).
10. P. Lu, H. P. Lee, C. Lu, and S. J. O'Shea, Phys. Rev. B 0163-1829 10.1103/PhysRevB.72.085405 72, 085405 (2005).
11. S. Cherian and T. Thundat, Appl. Phys. Lett. 0003-6951 10.1063/1.1463720 80, 2219 (2002).
12. S. Cherian, A. Mehta, and T. Thundat, Langmuir 0743-7463 10.1021/la025806m 18, 6935 (2002).
13. K. S. Hwang, J. H. Lee, J. Park, D. S. Yoon, J. H. Park, and T. S. Kim, Lab Chip 1473-0197 10.1039/b410905h 4, 547 (2004).
14. J. E. Sader, J. Appl. Phys. 0021-8979 10.1063/1.368002 84, 64 (1998).
15. C. P. Green and J. E. Sader, J. Appl. Phys. 0021-8979 10.1063/1.2136418 98, 114913 (2005).
16. S. Kim and K. D. Kihm, Appl. Phys. Lett. 0003-6951 10.1063/1.2240737 89, 061918 (2006).
17. S. Kim and K. D. Kihm, Appl. Phys. Lett. 0003-6951 10.1063/1.2680052 90, 081908 (2007).
18. S. Kim, K. C. Kim, and K. D. Kihm, Sensors 7, 3156 (2007).
19. M. J. Lachut and J. E. Sader, Phys. Rev. Lett. 0031-9007 10.1103/PhysRevLett.99.206102 99, 206102 (2007).
20. G. F. Wang and X. Q. Feng, Appl. Phys. Lett. 0003-6951 10.1063/1.2746950 90, 231904 (2007).
21. J. E. Sader, J. W. M. Chon, and P. Mulvaney, Rev. Sci. Instrum. 0034-6748 10.1063/1.1150021 70, 3967 (1999).
22. The thicknesses of microcantilevers are measured using a scanning electron microscope. The manufacturers provided the coating thicknesses data.
23. J. Kestin, H. E. Khalifa, and R. J. Correia, J. Phys. Chem. Ref. Data 10, 71 (1981). 0047-2689