A 1-V operated MEMS variable optical attenuator using piezoelectric PZT thin-film actuators

IEEE Journal on Selected Topics in Quantum Electronics

Volumn 15, Issue 5, 2009, Pages 1529-1536

  Lee, Chengkuo ^a,b   Hsiao, Fu Li ^a   Kobayashi, Takeshi ^c   Koh, Kah How ^a   Ramana, P V ^b   Xiang, Wenfeng ^a   Yang, Bin ^b   Tan, Chee Wei ^b   Pinjala, D ^b  

^a NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

^b INSTITUTE OF MICROELECTRONICS   (Singapore)

^c NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

Microelectromechanical systems (MEMS); Mirror; Optical MEMS; Piezoelectric actuator; PZT; Variable optical attenuators (VOAs)

Indexed keywords

DRIVING VOLTAGES; DUAL-CORE FIBERS; DYNAMIC RANGE; LIGHT ATTENUATION; LINEAR RELATION; MICRO ELECTRO MECHANICAL SYSTEM; MICROELECTROMECHANICAL SYSTEMS (MEMS); OPTICAL ANGLE; OPTICAL MEMS; PZT; PZT ACTUATOR; PZT LAYER; PZT THIN-FILM; REFLECTION MIRRORS; SI MIRROR; VARIABLE OPTICAL ATTENUATORS; VARIABLE OPTICAL ATTENUATORS (VOAS);

CANTILEVER BEAMS; COMPOSITE MICROMECHANICS; ELECTRIC ATTENUATORS; ELECTROMAGNETIC WAVE ATTENUATION; LIGHT REFLECTION; MECHATRONICS; MEMS; MICROELECTROMECHANICAL DEVICES; MIRRORS; PIEZOELECTRIC MATERIALS; PIEZOELECTRIC TRANSDUCERS; PIEZOELECTRICITY; SEMICONDUCTING LEAD COMPOUNDS; WAVEGUIDE ATTENUATORS;

PIEZOELECTRIC ACTUATORS;

EID: 70350210494     PISSN: 1077260X     EISSN: None     Source Type: Journal    
DOI: 10.1109/JSTQE.2009.2022959     Document Type: Conference Paper

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