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Volumn 18, Issue 11, 2008, Pages
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A fatigue test method for Pb(Zr,Ti)O3 thin films by using MEMS-based self-sensitive piezoelectric microcantilevers
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Author keywords
[No Author keywords available]
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Indexed keywords
ACTUATORS;
CHEMICAL SENSORS;
COMPOSITE MICROMECHANICS;
FATIGUE TESTING;
LEAD;
MEMS;
MICROELECTROMECHANICAL DEVICES;
PIEZOELECTRIC ACTUATORS;
PIEZOELECTRIC MATERIALS;
PIEZOELECTRIC TRANSDUCERS;
PIEZOELECTRICITY;
REAL TIME SYSTEMS;
SENSORS;
SILICON WAFERS;
SOLIDS;
THIN FILMS;
ZIRCONIUM;
DC BIASES;
FATIGUE CHARACTERISTICS;
FATIGUE CYCLES;
FUNCTION OF TIMES;
LEAD ZIRCONATE TITANATES;
MEMS MICROFABRICATION;
MICRO CANTILEVERS;
OUTPUT VOLTAGES;
PZT THIN FILMS;
SINE WAVES;
SOI WAFERS;
SEMICONDUCTING LEAD COMPOUNDS;
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EID: 58149345508
PISSN: 09601317
EISSN: 13616439
Source Type: Journal
DOI: 10.1088/0960-1317/18/11/115007 Document Type: Article |
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Times cited : (23)
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References (14)
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