A CMOS-MEMS mirror with curled-hinge comb drives

Journal of Microelectromechanical Systems

Volumn 12, Issue 4, 2003, Pages 450-457

  Xie, Huikai ^a   Pan, Yingtian ^b   Fedder, Gary K ^a  

^a CARNEGIE MELLON UNIVERSITY   (United States)

^b STONY BROOK UNIVERSITY   (United States)

Author keywords

Curled hinge comb drive; High aspect ratio; Micromirror; Out of plane actuation

Indexed keywords

ASPECT RATIO; CMOS INTEGRATED CIRCUITS; MICROMACHINING; MIRRORS; REACTIVE ION ETCHING; SEMICONDUCTING SILICON; SEMICONDUCTOR DEVICE MANUFACTURE; SINGLE CRYSTALS; THIN FILMS;

COMB-DRIVE DESIGN; CURLED HINGE COMB DRIVE; DEEP REACTIVE ION ETCHING; MICROMIRROR; PEAK-TO-PEAK CURLING; SINGLE CRYSTAL SILICON;

MICROELECTROMECHANICAL DEVICES;

EID: 0041386109     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2003.815839     Document Type: Article

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