Arrayed ultrasonic microsensors with high directivity for in-air use using PZT thin film on silicon diaphragms

Sensors and Actuators, A: Physical

Volumn 97-98, Issue , 2002, Pages 302-307

  Yamashita, Kaoru ^a   Katata, Hiroshi ^a   Okuyama, Masanori ^a   Miyoshi, Hiromi ^b   Kato, Genro ^b   Aoyagi, Seiji ^b   Suzuki, Yoshihiko ^c  

^a OSAKA UNIVERSITY   (Japan)

^b KANSAI UNIVERSITY   (Japan)

^c OSAKA MUNICIPAL TECHNICAL RESEARCH INSTITUTE   (Japan)

Author keywords

Array sensor; PZT; Ultrasonic

Indexed keywords

DIAPHRAGMS; IMAGE ANALYSIS; LEAD COMPOUNDS; MICROMACHINING; PIEZOELECTRIC DEVICES; SILICON ON INSULATOR TECHNOLOGY; THIN FILMS; ULTRASONIC APPLICATIONS;

ARRAYED ULTRASONIC MICOSENSORS; PIEZOELECTRIC DIAPHRAGMS; SILICON DIAPHRAGMS;

MICROSENSORS;

EID: 0036544004     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(02)00037-7     Document Type: Conference Paper

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