Large deflection micromechanical scanning mirrors for linear scans and pattern generation

IEEE Journal on Selected Topics in Quantum Electronics

Volumn 6, Issue 5, 2000, Pages 715-722

  Schenk, Harald ^a   Dürr, Peter ^a   Haase, Thomas ^a   Kunze, Detlef ^a   Sobe, Udo ^a   Lakner, Hubert ^a   Kück, Heinz ^b  

^a FRAUNHOFER INSTITUTE FOR MICROELECTRONIC CIRCUITS AND SYSTEMS   (Germany)

^b UNIVERSITY OF STUTTGART   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROSTATIC DEVICES; LIGHT SCATTERING; MICROACTUATORS; SILICON ON INSULATOR TECHNOLOGY;

LIGHT DEFLECTION; MICROMECHANICAL SCANNING MIRRORS (MSM);

MIRRORS;

EID: 0343026652     PISSN: 1077260X     EISSN: None     Source Type: Journal    
DOI: 10.1109/2944.892609     Document Type: Article

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