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Thin Solid Films

Volumn 516, Issue 16, 2008, Pages 5272-5276

Deflection of wafers and cantilevers with Pt/LNO/PZT/LNO/Pt/Ti/SiO2 multilayered structure

(4) Kobayashi, Takeshi a Ichiki, Masaaki a Noguchi, Toshihiko a Maeda, Ryutaro a

a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST (Japan)

Author keywords

Cantilevers; Deflection; Ferroelectrics; LNO; MEMS; Piezoelectrics; PZT

Indexed keywords

DEPOSITION; MEMS; MICROMACHINING; MULTILAYER FILMS; PERMITTIVITY; PIEZOELECTRIC DEVICES; SILICON COMPOUNDS;

DC RESPONSE; MEMS BULK MICROMACHINING; PIEZOELECTRIC MICRO CANTILEVERS; SATURATION POLARIZATION; TRANSVERSE PIEZOELECTRIC CONSTANT;

SILICON WAFERS;

EID: 43949111624 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/j.tsf.2007.07.067 Document Type: Article

Times cited : (19)

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