Fabrication of piezoelectric microcantilevers using LaNiO3 buffered Pb(Zr,Ti)O3 thin film

Journal of Micromechanics and Microengineering

Volumn 18, Issue 3, 2008, Pages

  Kobayashi, T ^a   Ichiki, M ^a   Kondou, R ^b   Nakamura, K ^b   Maeda, R ^a  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

^b TAIYO YUDEN CO LTD   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

LANTHANUM COMPOUNDS; LEAD COMPOUNDS; MEMS; MICROFABRICATION; THIN FILMS;

LNO THIN FILMS; PIEZOELECTRIC MICROCANTILEVERS; SYMMETRIC BUTTERFLY CURVE;

PIEZOELECTRIC DEVICES;

EID: 42549135855     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/18/3/035007     Document Type: Article

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