Development of shunt type ohmic RF MEMS switches actuated by piezoelectric cantilever

Sensors and Actuators, A: Physical

Volumn 136, Issue 1, 2007, Pages 282-290

  Lee, Hee Chul ^a   Park, Jae Hyoung ^b   Park, Yong Hee ^a  

^a LG Electronics Inc   (South Korea)

^b Ewha Womans University   (South Korea)

Author keywords

Low voltage operation; Piezoelectric actuator; PZT; RF MEMS; RF switch

Indexed keywords

ELECTRIC LINES; ELECTRIC POTENTIAL; ELECTRIC POWER UTILIZATION; INSERTION LOSSES; MACHINE DESIGN; MEMS; OHMIC CONTACTS; PIEZOELECTRIC ACTUATORS; PIEZOELECTRICITY;

CONTACT ELECTRODES; OHMIC SWITCHES; PIEZOELECTRIC CANTILEVER;

ELECTRIC SWITCHES;

EID: 34247133459     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2006.10.050     Document Type: Article

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