Micromachined piezoelectric force sensors based on PZT thin films

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control

Volumn 43, Issue 4, 1996, Pages 553-559

  Lee, Chengkuo ^a   Itoh, Toshihiro ^a   Suga, Tadatomo ^a  

^a UNIVERSITY OF TOKYO   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

MICROSCOPES; PIEZOELECTRIC DEVICES; PIEZOELECTRIC MATERIALS; PIEZOELECTRICITY; PRODUCT DESIGN; THIN FILMS;

LEAD ZIRCONATE TITANATE FORCE SENSOR; SCANNING FORCE MICROSCOPE;

SENSORS;

EID: 0030189152     PISSN: 08853010     EISSN: None     Source Type: Journal    
DOI: 10.1109/58.503715     Document Type: Article

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