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Volumn 43, Issue 6 B, 2004, Pages 3906-3909
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Scratch drive actuator driven self-assembled variable optical attenuator
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Author keywords
MEMS; SDA; Self assembly; Variable optical attenuator
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Indexed keywords
REFLECTIVE MIRRORS;
SCRATCH DRIVE ACTUATOR (SDA);
SELF-ASSEMBLY;
VARIABLE OPTICAL ATTENUATOR (VOA);
ACTUATORS;
ELECTRIC POTENTIAL;
INSERTION LOSSES;
MICROELECTROMECHANICAL DEVICES;
MICROMACHINING;
MIRRORS;
OPTICAL DESIGN;
REFLECTION;
RESIDUAL STRESSES;
ATTENUATION;
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EID: 4444311698
PISSN: 00214922
EISSN: None
Source Type: Journal
DOI: 10.1143/JJAP.43.3906 Document Type: Conference Paper |
Times cited : (6)
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References (8)
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