Scratch drive actuator driven self-assembled variable optical attenuator

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 43, Issue 6 B, 2004, Pages 3906-3909

  Lee, Chengkuo ^a   Lai, Yen Jyh ^a   Wu, Chia Yu ^a   Lin, Yu Shen ^a   Tasi, Ming Hung ^a   Huang, Ruey Shing ^a,b   Lin, Min Shyong ^a  

^a ASIA PACIFIC MICROSYSTEMS INC   (Taiwan)

^b NATIONAL TSING HUA UNIVERSITY   (Taiwan)

Author keywords

MEMS; SDA; Self assembly; Variable optical attenuator

Indexed keywords

REFLECTIVE MIRRORS; SCRATCH DRIVE ACTUATOR (SDA); SELF-ASSEMBLY; VARIABLE OPTICAL ATTENUATOR (VOA);

ACTUATORS; ELECTRIC POTENTIAL; INSERTION LOSSES; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; MIRRORS; OPTICAL DESIGN; REFLECTION; RESIDUAL STRESSES;

ATTENUATION;

EID: 4444311698     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/JJAP.43.3906     Document Type: Conference Paper

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