Electrostatic MEMS variable optical attenuator with rotating folded micromirror

IEEE Journal on Selected Topics in Quantum Electronics

Volumn 10, Issue 3, 2004, Pages 558-562

  Lim, Tae Sun ^a   Ji, Chang Hyeon ^a   Oh, Chang Hoon ^a   Kwon, Hyouk ^a   Yee, Youngjoo ^a   Bu, Jong Uk ^a  

^a LG Electronics Inc   (South Korea)

Author keywords

Comb drive actuator; Electrostatic actuation; Reflection type; Variable optical attenuator (VOA)

Indexed keywords

ELECTROOPTICAL DEVICES; ETCHING; IONS; LENSES; LIGHT POLARIZATION; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; MIRRORS; OPTICAL FIBERS; PHOTOLITHOGRAPHY; WAVELENGTH DIVISION MULTIPLEXING;

COMB-DRIVE ACTUATORS; ELECTROSTATIC ACTUATION; REFLECTION TYPE; VARIABLE OPTICAL ATTENUATOR (VOA);

ELECTRIC ATTENUATORS;

EID: 4344600669     PISSN: 1077260X     EISSN: None     Source Type: Journal    
DOI: 10.1109/JSTQE.2004.828492     Document Type: Article

References (6)

1. C. Marxer, P. Griss, and N. F. de Rooij, "A variable optical attenuator based on silicon micromechanics," IEEE Photon. Technol. Lett., vol. 11, pp. 233-235, Feb. 1999.
2. C.-H. Ji, Y. Yee, J. Choi, and J. U. Bu, "Electromagnetic variable optical attenuator," in Proc. Optical MEMS 2002, pp. 49-50.
3. C. Marxer, B. de Jong, and N. de Rooij, "Comparison of MEMS variable optical attenuator designes," in Proc. Optical MEMS 2002, pp. 189-190.
4. C.-H. Kim, N. Park, and Y.-K. Kim, "MEMS reflective type variable optical attenuator using off-axis misalignment," in Proc. Optical MEMS 2002, pp. 55-56.
5. Corning (home page) [Online]. Available: http://www.corning.com/
6. Optical Research Associates (home page) [Online]. Available: http://www.opticalres.com/