Optical and mechanical models for a variable optical attenuator using a micromirror drawbridge

Journal of Micromechanics and Microengineering

Volumn 13, Issue 3, 2003, Pages 400-411

  Liu, A Q ^a   Zhang, X M ^a   Lu, C ^a,b   Wang, F ^b   Liu, Z S ^b  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

^b INSTITUTE OF HIGH PERFORMANCE COMPUTING   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

FINITE ELEMENT METHOD; MATHEMATICAL MODELS; MICROOPTICS; MIRRORS;

MICROMIRROR; VARIABLE OPTICAL ATTENUATORS;

MICROELECTROMECHANICAL DEVICES;

EID: 0037677923     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/13/3/308     Document Type: Article

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