PZT actuated micromirror for fine-tracking mechanism of high-density optical data storage

Sensors and Actuators, A: Physical

Volumn 89, Issue 1-2, 2001, Pages 166-173

  Yee, Youngjoo ^a   Nam, Hyo Jin ^a   Lee, See Hyung ^a   Bu, Jong Uk ^a   Lee, Joong Won ^a  

^a LG Electronics Inc   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

BENDING (FORMING); ELECTRIC PROPERTIES; LASER BEAM EFFECTS; MECHANICAL PROPERTIES; NUMERICAL ANALYSIS; OPTICAL DATA STORAGE; PIEZOELECTRIC DEVICES; REFLECTION; SOL-GELS;

MICROMIRROR; PIEZOELECTRIC CANTILEVERED UNIMORPHS;

MICROACTUATORS;

EID: 0035280918     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(00)00535-5     Document Type: Article

References (11)

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