MEMS variable optical attenuator using a translation motion of 45° tilted vertical mirror

Journal of Micromechanics and Microengineering

Volumn 15, Issue 8, 2005, Pages 1466-1475

  Kim, Che Heung ^a,b   Kim, Yong Kweon ^a  

^a Seoul National University   (South Korea)

^b Samsung Advanced Institute of Technology (SAIT)   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROMAGNETIC WAVE ATTENUATION; LIGHT MODULATION; LIGHT POLARIZATION; MICROELECTROMECHANICAL DEVICES; MIRRORS; WAVELENGTH DIVISION MULTIPLEXING;

OPTICAL SIMULATORS; TRANSLATION MOTION; VARIABLE OPTICAL ATTENUATORS (VOA); WAVELENGTH-DEPENDENT LOSS (WDL);

OPTICAL DEVICES;

EID: 22544440635     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/15/8/013     Document Type: Article

References (16)

1. Marxer C, Thio C, Gretillat M-A, de Rooij N F, Battig R, Anthamatten O, Valk B and Vogel P 1997 Vertical mirrors fabricated by deep reactive ion etching for fiber-optic switching applications J. Microelectromech. Syst. 6 277-85
2. Marxer C, Griss P and de Rooij N F 1999 A variable optical attenuator based on silicon micromechanics IEEE Photon. Technol. Lett. 11 233-5
3. Barber B, Giles C R, Askyuk V, Ruel R, Stulz L and Bishop D 1998 A fiber connectorized MEMS variable optical attenuator IEEE Photon. Technol. Lett. 10 1262-4
4. Yun S S, Kim Y Y, Kown H N, Kim W H, Lee J H, Lee Y G and Jung S C 2002 Optical characteristics of a micromachined VOA using successive partial transmission in a silicon optical leaker IEEE/LEOS Int. Conf. on Optical MEMS pp 51-52
5. Ji C-H, Lee Y, Choi J and Bu J-U 2002 Electromagnetic variable optical attenuator IEEE/LEOS Int. Conf. on Optical MEMS pp 49-50
6. Andersen B M, Fairchild S and Thorsten N 2000 MEMS variable optical attenuator for DWDM optical amplifiers Opt. Fiber Commun. 2 260-2
7. Sumriddetchkajorn S and Riza N A 2002 Fault-tolerant three-port fiber-optic attenuator using small tilt micro mirror device Opt. Commun. 205 77-86
8. Ford J E, Walker J A, Greywall D S and Goossen K W 1998 Micromechanical fiber-optic attenuator with 3 s response J. Lightwave Technol. 16 1663-70
9. Marxer C, de Jong B and de Rooij N 2002 Comparison of MEMS variable optical attenuator designs IEEE/LEOS Int. Conf. on Optical MEMS pp 189-90
10. www.santec.com
11. www.sercalo.com
12. www.diconfiber.com
13. Kim C-H, Park N and Kim Y-K 2002 MEMS reflective type variable optical attenuator using off-axis misalignment IEEE/LEOS Int. Conf. on Optical MEMS (20-23 Aug. 2002) pp 55-6
14. Kim C-H, Park J, Park N and Kim Y-K 2003 MEMS fiber-optic variable optical attenuator using collimating lensed fiber IEEE/LEOS Int. Conf. on Optical MEMS (18-21 Aug. 2003) pp 145-6
15. Kim C-H and Kim Y-K 2005 Prevention method of a notching caused by surface charging in silicon reactive ion etching J. Micromech. Microeng. 15 358-61
16. Beckmann P and Spizzichino A 1987 The Scattering of Electromagnetic Waves from Rough Surfaces (Norwood, MA: Artech House) chapters 3-5