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Volumn 66, Issue , 2004, Pages 3-17

Microfabrication of piezoelectric MEMS

Author keywords

Micromachining; Plasma etching; PZT; Ultrasonic transducers

Indexed keywords

MICROMACHINING; PERMITTIVITY; PIEZOELECTRIC DEVICES; PLASMA ETCHING; SUBSTRATES; ULTRASONIC TRANSDUCERS;

EID: 33751195947     PISSN: 10584587     EISSN: 16078489     Source Type: Conference Proceeding    
DOI: 10.1080/10584580490894302     Document Type: Article
Times cited : (8)

References (41)
  • 1
    • 0033682798 scopus 로고    scopus 로고
    • Ferroelectric thin films for micro-sensors and actuators: A review
    • P. Muralt, "Ferroelectric thin films for micro-sensors and actuators: a review," J. Micromech. Microeng. 10, 136-146 (2000).
    • (2000) J. Micromech. Microeng. , vol.10 , pp. 136-146
    • Muralt, P.1
  • 3
    • 0001407875 scopus 로고    scopus 로고
    • PZT cantilever for non-contact atomic force microscopy
    • Y. Miyahara, "PZT cantilever for non-contact atomic force microscopy," Appl. Surf. Sci. 140, 428-431 (1999).
    • (1999) Appl. Surf. Sci. , vol.140 , pp. 428-431
    • Miyahara, Y.1
  • 6
    • 0030243326 scopus 로고    scopus 로고
    • Silicon micromachining technology
    • W. Lang, "Silicon micromachining technology," Materials Science and Engineering R17, 1-55 (1996).
    • (1996) Materials Science and Engineering , vol.R17 , pp. 1-55
    • Lang, W.1
  • 8
    • 0035767659 scopus 로고    scopus 로고
    • Reliable integration of piezoelectric lead zirconate titanate with MEMS fabrication process
    • S. J. Gross, et al., "Reliable integration of piezoelectric lead zirconate titanate with MEMS fabrication process," Proceedings of the SPIE 4558, 72-80 (2001).
    • (2001) Proceedings of the SPIE , vol.4558 , pp. 72-80
    • Gross, S.J.1
  • 10
    • 3142682981 scopus 로고    scopus 로고
    • 3 (PZT) thin films into micromachined sensors and acuators
    • P.F.E.H. Tay, Editor. (Kluwer Academic Publishers, The Netherlands)
    • 3 (PZT) thin films into micromachined sensors and acuators, in Materials and Process Integration for MEMS, P.F.E.H. Tay, Editor. (Kluwer Academic Publishers, The Netherlands, 2002), pp. 3-27.
    • (2002) Materials and Process Integration for MEMS , pp. 3-27
    • Muralt, S.J.1
  • 11
    • 0003998388 scopus 로고
    • CRC, David. R. Lide, Ed., (CRC Press)
    • Handbook of Chemistry and Physics, CRC, David. R. Lide, Ed., (CRC Press, 1995).
    • (1995) Handbook of Chemistry and Physics
  • 13
    • 0031377393 scopus 로고    scopus 로고
    • Fabrication Processof PZT Piezoelectric cantilever unimorphs using surface micromachining
    • J. H. Kim, et al., "Fabrication Processof PZT Piezoelectric cantilever unimorphs using surface micromachining," Integrated Ferroelectrics 15, 325-332 (1997).
    • (1997) Integrated Ferroelectrics , vol.15 , pp. 325-332
    • Kim, J.H.1
  • 14
    • 0026839737 scopus 로고
    • Piezoelectric micromotors for microrobots
    • A. M. Flynn, et al., "Piezoelectric micromotors for microrobots," J. Microelectromechanical Sytems 1, 44-51(1992).
    • (1992) J. Microelectromechanical Sytems , vol.1 , pp. 44-51
    • Flynn, A.M.1
  • 16
    • 0032095983 scopus 로고    scopus 로고
    • Flexural-standing-wave elastic force motor using ZnO and PZT thin film on micromachined silicon membranes for wristwatch applications
    • G.-A. Racine, P. Muralt, and M.-A. Dubois, "Flexural-standing-wave elastic force motor using ZnO and PZT thin film on micromachined silicon membranes for wristwatch applications," Smart Mater. Struct. 7, 404-416 (1998).
    • (1998) Smart Mater. Struct. , vol.7 , pp. 404-416
    • Racine, G.-A.1    Muralt, P.2    Dubois, M.-A.3
  • 17
    • 0033086697 scopus 로고    scopus 로고
    • Fabrication and characterization of micromachined accelerometers based on PZT thin films
    • J. Baborowski, et al., "Fabrication and Characterization of Micromachined Accelerometers based on PZT thin films," Ferroelectrics 224, 283-290 (1999).
    • (1999) Ferroelectrics , vol.224 , pp. 283-290
    • Baborowski, J.1
  • 18
    • 0035425634 scopus 로고    scopus 로고
    • Highly sensitive triaxial silicon accelerometer with integrated PZT thin film detectors
    • K. Kunz, P. Enoksson, and G. Stemme, "Highly sensitive triaxial silicon accelerometer with integrated PZT thin film detectors," Sensors and Actuators A 92, 156-160 (2001).
    • (2001) Sensors and Actuators A , vol.92 , pp. 156-160
    • Kunz, K.1    Enoksson, P.2    Stemme, G.3
  • 19
    • 0032164248 scopus 로고    scopus 로고
    • Piezoelectric cantilever acoustic transducer
    • S. S. Lee and R. M. White, "Piezoelectric cantilever acoustic transducer," J. Micromech. Microeng. 8, 230-238 (1998).
    • (1998) J. Micromech. Microeng. , vol.8 , pp. 230-238
    • Lee, S.S.1    White, R.M.2
  • 20
    • 0033537528 scopus 로고    scopus 로고
    • Application of sol-gel deposited thin PZT film for actuation of 1D and 2D scanners
    • A. Schroth, et al., "Application of sol-gel deposited thin PZT film for actuation of 1D and 2D scanners," Sensors and Actuators A 73, 144-152 (1999).
    • (1999) Sensors and Actuators A , vol.73 , pp. 144-152
    • Schroth, A.1
  • 21
    • 0032733299 scopus 로고    scopus 로고
    • Self-excited piezoelectric PZT microcantilevers for dynamic SFM - With inherent sensing and actuating capabilities
    • C. Lee, T. Itoh, and T. Suga, "Self-excited piezoelectric PZT microcantilevers for dynamic SFM - with inherent sensing and actuating capabilities," Sensors and Actuators A 72, 179-188 (1999).
    • (1999) Sensors and Actuators A , vol.72 , pp. 179-188
    • Lee, C.1    Itoh, T.2    Suga, T.3
  • 22
    • 0031233648 scopus 로고    scopus 로고
    • Micromachined high frequency ferroelectric sonar transducers
    • J. J. Bernstein, et al., "Micromachined high frequency ferroelectric sonar transducers," IEEE Tran. UFFC 44(5), 960-969 (1997).
    • (1997) IEEE Tran. UFFC , vol.44 , Issue.5 , pp. 960-969
    • Bernstein, J.J.1
  • 24
    • 0032048189 scopus 로고    scopus 로고
    • Stabilized platinum electrodes for ferroelectric film deposition using Ti, Ta and Zr adhesion layers
    • T. Maeder, L. Sagalowicz, and P. Muralt, "Stabilized platinum electrodes for ferroelectric film deposition using Ti, Ta and Zr adhesion layers," Jpn. J. Appl. Phys. 37, 2007-2012 (1998).
    • (1998) Jpn. J. Appl. Phys. , vol.37 , pp. 2007-2012
    • Maeder, T.1    Sagalowicz, L.2    Muralt, P.3
  • 25
    • 0001143028 scopus 로고    scopus 로고
    • 2 seeding
    • 2 seeding," J. Appl. Phys. 83(7), 3835-3841 (1998).
    • (1998) J. Appl. Phys. , vol.83 , Issue.7 , pp. 3835-3841
    • Murait, P.1
  • 26
    • 0003048396 scopus 로고
    • Pb(Zr,Ti)O3 thin films by in-situ reactive sputtering on micromachined membranes for micromechanical applications
    • T. Maeder, et al., "Pb(Zr,Ti)O3 thin films by in-situ reactive sputtering on micromachined membranes for micromechanical applications," British Ceram. Proc. 54, 206-218 (1995).
    • (1995) British Ceram. Proc. , vol.54 , pp. 206-218
    • Maeder, T.1
  • 27
    • 0024647478 scopus 로고
    • Study of electrochemical etch-stop for high-precision thickness control of silicon membranes
    • B. Kloeck, et al., "Study of electrochemical etch-stop for high-precision thickness control of silicon membranes," IEEE Transactions on Electron Devices 36(4), 663-669 (1989).
    • (1989) IEEE Transactions on Electron Devices , vol.36 , Issue.4 , pp. 663-669
    • Kloeck, B.1
  • 30
    • 0029492132 scopus 로고
    • Reactive ion etching of Pt/PZT/Pt ferroelectric thin film capacitors in high density DECR plasma
    • H. Macé, H. Achard, and L. Pcccoud, "Reactive ion etching of Pt/PZT/Pt ferroelectric thin film capacitors in high density DECR plasma," Microelectronic Engineering 29, 45-48 (1995).
    • (1995) Microelectronic Engineering , vol.29 , pp. 45-48
    • Macé, H.1    Achard, H.2    Pcccoud, L.3
  • 31
    • 0033337893 scopus 로고    scopus 로고
    • Dry etching of sol-gel PZT
    • R. Zeto, et al., "Dry etching of sol-gel PZT," Mat. Res. Soc. Symp. Proc. 546, 159-164 (1999).
    • (1999) Mat. Res. Soc. Symp. Proc. , vol.546 , pp. 159-164
    • Zeto, R.1
  • 32
    • 0028546047 scopus 로고
    • 2 films by environmentally safe gases
    • 2 films by environmentally safe gases," J. Mater. Res. 9(11), 2976-2980 (1994).
    • (1994) J. Mater. Res. , vol.9 , Issue.11 , pp. 2976-2980
    • Pan, W.1
  • 33
    • 0005018737 scopus 로고    scopus 로고
    • Reactive ion etching of PZT thin films in an inductively coupled plasma
    • C. W. Chung, "Reactive ion etching of PZT thin films in an inductively coupled plasma," J. Vac. Sci. Technol. B, 16(4), 1894-1900 (1998).
    • (1998) J. Vac. Sci. Technol. B , vol.16 , Issue.4 , pp. 1894-1900
    • Chung, C.W.1
  • 37
    • 0342523918 scopus 로고
    • A very compact electron cyclotron resonance ion source
    • F. Boukari, et al., "A very compact electron cyclotron resonance ion source," Rev. Sci. lustrum. 65(4), 1097-1099 (1994).
    • (1994) Rev. Sci. Lustrum. , vol.65 , Issue.4 , pp. 1097-1099
    • Boukari, F.1
  • 38
    • 0034449315 scopus 로고    scopus 로고
    • 3 thin film etching with ECR/RF reactor
    • 3 thin film etching with ECR/RF reactor," Integrated Ferroelectrics 31, 261-271 (2000).
    • (2000) Integrated Ferroelectrics , vol.31 , pp. 261-271
    • Baborowski, J.1
  • 39
    • 33751180661 scopus 로고    scopus 로고
    • Patent US6284148: Method for anisotropic etching of silicon. USA
    • F. Lärmer, and A. Schilp, Patent US6284148: Method for anisotropic etching of silicon. USA (2001).
    • (2001)
    • Lärmer, F.1    Schilp, A.2
  • 40
    • 0032674784 scopus 로고    scopus 로고
    • Recent advances in silicon etching for MEMS using the ASETM process
    • A. M. Hynes, et al., "Recent advances in silicon etching for MEMS using the ASETM process," Sensors and Actuators A, 74, 13-17 (1999).
    • (1999) Sensors and Actuators A , vol.74 , pp. 13-17
    • Hynes, A.M.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.