A Variable Optical Attenuator Based on Silicon Micromechanics

IEEE Photonics Technology Letters

Volumn 11, Issue 2, 1999, Pages 233-235

  Marxer, Cornel ^a   Griss, Patrick ^a   De Rooij, Nicolaas F ^a  

^a UNIVERSITY OF NEUCHÂTEL   (Switzerland)

Author keywords

Fiber optic component; Microelectromechanical systems (MEMS); Variable optical attenuator

Indexed keywords

ACTUATORS; ELECTROMAGNETIC WAVE ATTENUATION; ELECTROSTATIC DEVICES; INSERTION LOSSES; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; SINGLE MODE FIBERS;

VARIABLE OPTICAL ATTENUATORS;

FIBER OPTIC COMPONENTS;

EID: 0033080136     PISSN: 10411135     EISSN: None     Source Type: Journal    
DOI: 10.1109/68.740714     Document Type: Article

References (6)

1. J. H. Herman and D. J. Clift, "Minuature Fabry-Perot interferometers micromachined in silicon for use in optical fiber WDM systems," in Tech. Dig. 6th Int. Conf. Solid-State Sensors and Actuators (Transducers'91), San Francisco, CA, 1991, pp. 372-375.
2. K. Hogari and T. Matsumoto, "Electrostatically driven fiber-optic micromechanical on/off switch and its application to subscriber transmission systems," J. Lightwave Technol., vol. 8, pp. 722-727, 1990.
3. S. S. Lee, L. Y. Lin, and M. C. Wu, "Surface micromachined free space fiber-optic switches," Electron. Lett., vol. 31, no. 17, pp. 1481-1482, 1995.
4. K. W. Goossen, J. A. Walker, and S. C. Arney, "Silcon modulator based on mechanically active anti-reflection layer with 1 Mbit/sec capability of fiber-in-the-loop applications," IEEE Photon. Technol. Lett., vol. 6, pp. 1119-1121, Sept. 1994.
5. C. Marxer, M. A. Gretillat, V. P. Jaecklin, R. Baettig, O. Anthamatten, P. Vogel, and N. F. de Rooij, "Megahertz opto-mechanical modulator," Sensors and Actuators, vol. A52, pp. 46-50, 1996.
6. C. Marxer, C. Thio, M.-A. Gretillat, O. Anthamatten, R. Baettig, B. Valk, P. Vogel, and N. F. de Rooij, "Vertical mirrors fabricated by deep reactive ion etching for fiber optic switching applications," IEEE J. Microelectromech. Syst., vol. 6, no. 3, pp. 277-285, Sept. 1997.